Electrical and Electronic Department, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia.
Sensors (Basel). 2011;11(8):7724-35. doi: 10.3390/s110807724. Epub 2011 Aug 5.
A gas sensor array was developed in a 10 × 10 mm(2) space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO(2) and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O(2). A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.
使用丝网印刷和脉冲激光烧蚀沉积（PLAD）技术，在 10×10mm(2)的空间内开发了一个气体传感器阵列。加热器、电极和绝缘层通过丝网印刷方法印刷在氧化铝基板上，而氧化锡和铂薄膜作为传感和催化剂层，分别通过 PLAD 方法在室温下沉积在电极上。为了烧蚀 SnO(2)和 Pt 靶材，使用功率为 0.7J/s、波长为 1064nm 的 Nd-YAG 激光，在包含 0.04mbar（4kPa）O(2)的气氛中，沉积时间分别为 2、5 和 10min。采用一系列光谱衍射和实空间成像技术，如 SEM、EDX、XRD 和 AFM，对薄膜的表面形貌、结构和组成进行了表征。对该阵列的测量表明，它可以对一些溶剂和木烟产生敏感响应，具有较短的响应和恢复时间。
