Choi Jeongyun, Chung Jinwook
R&D Center, Samsung Engineering Co. Ltd, 41 Maeyoung-Ro, 269-Gil, 4 Youngtong-Gu, Suwon, Gyeonggi-Do, 16523, Korea.
Anal Sci. 2020 Dec 10;36(12):1565-1569. doi: 10.2116/analsci.20A003. Epub 2020 Jul 24.
An on-line HO analyzer was developed for application to the ultrapure water production process, using a gasometric method. The analyzer consists of a dissolved oxygen (DO) sensor and analyzer, a catalyst that converts HO to O, and a computer that stores the DO data. HO concentrations were calculated by measuring the change in DO concentration before and after the catalyst and using the calculation formula presented in this study. In order to accurately analyze a sub-ppb level of HO, a DO meter which can correctly measure the DO concentration at the ppb level was applied. An ion exchange resin with Pd, was selected as an appropriate catalyst since it could decompose 99% of HO to O at a space velocity of 120/h. The minimum analysis time was 20 min, and the detection limit was observed to be 0.27 ppb. When the DO concentration of the sample was 1.5 ppb or lower, an HO concentration of 1 ppb or lower was successfully measured. Good correlation, with an R value of 0.99, was observed between the measured and calculated HO concentrations.
开发了一种采用气体容量法应用于超纯水生产过程的在线过氧化氢分析仪。该分析仪由溶解氧（DO）传感器及分析仪、将过氧化氢转化为氧气的催化剂以及存储DO数据的计算机组成。通过测量催化剂前后DO浓度的变化并使用本研究给出的计算公式来计算过氧化氢浓度。为了准确分析亚ppb水平的过氧化氢，采用了能够正确测量ppb水平DO浓度的DO计。选择含钯离子交换树脂作为合适的催化剂，因为它在空速为120/h时能将99%的过氧化氢分解为氧气。最短分析时间为20分钟，检测限为0.27 ppb。当样品的DO浓度为1.5 ppb或更低时，成功测量到了1 ppb或更低的过氧化氢浓度。测量的和计算的过氧化氢浓度之间观察到良好的相关性，R值为0.99。
