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基于多物理场的空气轴承电动主轴非线性动力学行为分析

Multi-Physics Fields Based Nonlinear Dynamic Behavior Analysis of Air Bearing Motorized Spindle.

作者信息

Chen Guoda, Chen Yijie, Lu Qi, Wu Quanhui, Wang Minghuan

机构信息

College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310023, China.

Key Laboratory of Special Purpose Equipment and Advanced Processing Technology, Ministry of Education and Zhejiang Province, Zhejiang University of Technology, Hangzhou 310023, China.

出版信息

Micromachines (Basel). 2020 Jul 25;11(8):723. doi: 10.3390/mi11080723.

DOI:10.3390/mi11080723
PMID:32722504
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7464085/
Abstract

The air bearing motorized spindle (ABMS) is the key component of the ultra-precision machine tool, which plays an important role in the ultra-precision machining process and directly influences machining accuracy. The influence of unbalanced magnetic force (UMF) on the nonlinear dynamic behavior of the ABMS is not understood clearly. To reveal the potential influence of the UMF, a mathematical model of the ABMS considering multiphysics fields is established. The variation trend of the UMF is simulated, and the nonlinear dynamic behavior of the ABMS is analyzed which emphasizes on the stability of the rotating shaft. It is shown that the UMF varies linearly at large rotor eccentricity which meets well with previous research, but it is noteworthy the UMF varies nearly to a quadratic function at small rotor eccentricity. The result of rotor dynamics shows that the UMF can change the converge position of the rotor center and the converge speed. Moreover, when at certain rotor mass and external load, the UMF can enlarge the stability boundary of the rotor. This research provides an example of analyzing the nonlinear dynamic behavior of the ABMS considering multiphysics fields which may help to the further investigation.

摘要

空气轴承电动主轴(ABMS)是超精密机床的关键部件,在超精密加工过程中起着重要作用,直接影响加工精度。不平衡磁力(UMF)对ABMS非线性动态行为的影响尚未完全明确。为揭示UMF的潜在影响,建立了考虑多物理场的ABMS数学模型。模拟了UMF的变化趋势,分析了ABMS的非线性动态行为,重点关注旋转轴的稳定性。结果表明,在大转子偏心距时UMF呈线性变化,这与先前的研究结果吻合良好,但值得注意的是,在小转子偏心距时UMF近似呈二次函数变化。转子动力学结果表明,UMF会改变转子中心的收敛位置和收敛速度。此外,在一定的转子质量和外部负载下,UMF会扩大转子的稳定性边界。本研究提供了一个考虑多物理场分析ABMS非线性动态行为的实例,可能有助于进一步的研究。

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本文引用的文献

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Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing.利用二氧化硅薄膜辅助工艺制造用于功率微机电系统(MEMS)应用的紧凑型微型空气轴承装置。
Micromachines (Basel). 2018 Apr 2;9(4):166. doi: 10.3390/mi9040166.
空气静压主轴的多场耦合动力学建模
Micromachines (Basel). 2021 Mar 1;12(3):251. doi: 10.3390/mi12030251.