Fan Shuyao, Wang Wen, Li Xueling, Jia Yana, Sun Yuan, Liu Mengwei
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China.
Sensors (Basel). 2020 Jul 27;20(15):4160. doi: 10.3390/s20154160.
A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of AlO/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical coupling of modes (COM) model. The SAW propagation characteristics in the layered structure were investigated theoretically by employing the finite element method (FEM). Multiple acoustic-wave modes that occurred in the AlN composite structure was analyzed, and the corresponding suppression of spurious mode was proposed. The COM simulation parameters corresponding to the effective acoustic-wave mode were extracted, and the optimized parameters of the one-port SAW resonator with a high-quality factor were determined.
本文提出了一种具有AlO/IDTs/AlN/Metal/Si氮化铝（AlN）复合结构的表面声波（SAW）器件，用于极端高温环境下的传感。利用典型的模式耦合（COM）模型进行优化，以确定SAW器件的最佳设计参数。采用有限元方法（FEM）从理论上研究了分层结构中SAW的传播特性。分析了AlN复合结构中出现的多种声波模式，并提出了相应的杂散模式抑制方法。提取了与有效声波模式对应的COM仿真参数，确定了具有高品质因数的单端口SAW谐振器的优化参数。
