超高性能表面声波器件中高频杂散响应的建模

Modeling for High-Frequency Spurious Responses in Incredible High-Performance Surface Acoustic Wave Devices.

作者信息

Jiang Guanzhen, Shuai Yao, Wei Zijie, Yao Jialin, Luo Wenbo, Pan Xinqiang, Wu Chuangui, Zhang Wanli

机构信息

School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

State Key Laboratory of Electronic Thin Films and Integrated Device, University of Electronic Science and Technology of China, Chengdu 611731, China.

出版信息

Micromachines (Basel). 2024 Jan 15;15(1):134. doi: 10.3390/mi15010134.

DOI:10.3390/mi15010134

PMID:38258253

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10819722/

Abstract

To ensure that surface acoustic wave (SAW) filters fulfill the requirements of Carrier Aggregation (CA) applications, the development of modeling tools that can forecast and simulate high-frequency spurious responses has been necessary. This paper presents an advanced methodology for extending the coupling-of-modes (COM) model to obtain precise modeling of the high-frequency spurious responses of incredible high-performance surface acoustic wave (I.H.P. SAW) devices. The extended COM (ECOM) model is derived by modifying the conventional COM model and extending it accordingly. The parameters used in this model are determined through numerical fitting. For validation, firstly, the ECOM model is applied to a one-port synchronous I.H.P. SAW resonator, and the simulation and measurement results match. Then, the structural parameters of the ECOM model are varied, and the accuracy of the model after the structural parameters are varied is verified. It is demonstrated that this model can be applied to the design work of SAW filters. Finally, the ECOM model is applied to the design of the I.H.P. SAW filter based on a 42°YX-LiTaO (LT)/SiO/AlN/Si structure. By using this method, the I.H.P. SAW filter's high-frequency spurious response can be predicted more accurately.

摘要

为确保表面声波（SAW）滤波器满足载波聚合（CA）应用的要求，开发能够预测和模拟高频杂散响应的建模工具变得十分必要。本文提出了一种先进的方法，用于扩展模式耦合（COM）模型，以精确建模超高性能表面声波（I.H.P. SAW）器件的高频杂散响应。扩展COM（ECOM）模型是通过修改传统COM模型并相应扩展而推导出来的。该模型中使用的参数通过数值拟合确定。为进行验证，首先将ECOM模型应用于单端口同步I.H.P. SAW谐振器，仿真结果与测量结果相符。然后，改变ECOM模型的结构参数，并验证结构参数改变后模型的准确性。结果表明，该模型可应用于SAW滤波器的设计工作。最后，将ECOM模型应用于基于42°YX-LiTaO（LT）/SiO/AlN/Si结构的I.H.P. SAW滤波器的设计。通过使用该方法，可以更准确地预测I.H.P. SAW滤波器的高频杂散响应。