Opt Lett. 2020 Aug 15;45(16):4468-4471. doi: 10.1364/OL.392072.
Measuring rough surfaces is challenging because the proven topographic methods are impaired by the adverse effects of diffuse light. In our method, the measured surface is marked by fluorescent nanobeads allowing a complete suppression of diffuse light by bandpass filtering. Light emitted by each fluorescent bead is shaped to a double-helix point spread function used for three-dimensional bead localization on the surface. This non-interferometric measurement of rough surface topography is implemented in a vibration resistant setup. The comparison of our method with vertical scanning interferometry shows that a commercial profiler is surpassed when ground glass surfaces with steep slopes are measured.
测量粗糙表面具有挑战性，因为已证实的形貌测量方法受到漫射光的不利影响。在我们的方法中，通过荧光纳米珠对被测表面进行标记，从而通过带通滤波完全抑制漫射光。每个荧光珠发出的光被整形为双螺旋点扩散函数，用于对表面上的荧光珠进行三维定位。这种对粗糙表面形貌的非干涉测量在抗振装置中实现。我们的方法与垂直扫描干涉测量的比较表明，在测量具有陡峭斜率的磨砂玻璃表面时，商用轮廓仪得到了超越。
