Qiu Huaqing, Liu Yong, Luan Chao, Kong Deming, Guan Xiaowei, Ding Yunhong, Hu Hao
Opt Lett. 2020 Sep 1;45(17):4806-4809. doi: 10.1364/OL.400230.
Silicon photonic integrated circuits (PICs) show great potential for many applications. The phase tuning technique is indispensable and of great importance in silicon PICs. An optical phase shifter with balanced overall performance on power consumption, insertion loss, footprint, and modulation bandwidth is essential for harnessing large-scale integrated photonics. However, few proposed phase shifter schemes on various platforms have achieved a well-balanced performance. In this Letter, we experimentally demonstrate a thermo-optic phase shifter based on a densely distributed silicon spiral waveguide on a silicon-on-insulator platform. The phase shifter shows a well-balanced performance in all aspects. The electrical power consumption is as low as 3 mW to achieve a phase shift, the optical insertion loss is 0.9 dB per phase shifter, the footprint is 67×28µ under a standard silicon photonics fabrication process without silicon air trench or undercut process, and the modulation bandwidth is measured to be 39 kHz.
硅光子集成电路（PIC）在许多应用中显示出巨大潜力。相位调谐技术在硅PIC中不可或缺且至关重要。对于大规模集成光子学的应用而言，一款在功耗、插入损耗、占用面积和调制带宽等方面具有平衡整体性能的光相位调制器至关重要。然而，在各种平台上提出的相位调制器方案中，很少有能实现性能全面平衡的。在本信函中，我们通过实验展示了一种基于绝缘体上硅平台上密集分布的硅螺旋波导的热光相位调制器。该相位调制器在各个方面都表现出了良好的平衡性能。实现一次相位偏移的功耗低至3 mW，每个相位调制器的光插入损耗为0.9 dB，在没有硅空气槽或底切工艺的标准硅光子制造工艺下，占用面积为67×28µ，测量得到的调制带宽为39 kHz。
