Liu Shengping, Feng Junbo, Tian Ye, Zhao Heng, Jin Li, Ouyang Boling, Zhu Jiguang, Guo Jin
Chongqing United Microelectronics Center, Chongqing, 401332, China.
Front Optoelectron. 2022 Apr 12;15(1):9. doi: 10.1007/s12200-022-00012-9.
Silicon photonic platforms offer relevance to large markets in many applications, such as optical phased arrays, photonic neural networks, programmable photonic integrated circuits, and quantum computation devices. As one of the basic tuning devices, the thermo-optic phase shifter (TOPS) plays an important role in all these applications. A TOPS with the merits of easy fabrication, low power consumption, small thermal time constant, low insertion loss, small footprint, and low crosstalk, is needed to improve the performance and lower the cost of the above applications. To meet these demands, various TOPS have been proposed and experimentally demonstrated on different foundry platforms In this paper, we review the state-of-the-art of TOPS, including metal heater, doped silicon, silicide, with silicon substrate undercut for heat insulation, folded waveguide structure, and multi-pass waveguide structure. We further compare these TOPSs and propose the directions of the future developments on TOPS.
硅光子平台在许多应用中与大市场相关，如光学相控阵、光子神经网络、可编程光子集成电路和量子计算设备。作为基本的调谐器件之一，热光移相器（TOPS）在所有这些应用中都起着重要作用。为了提高上述应用的性能并降低成本，需要一种具有易于制造、低功耗、小热时间常数、低插入损耗、小尺寸和低串扰等优点的TOPS。为了满足这些需求，人们已经在不同的代工平台上提出并通过实验证明了各种TOPS。在本文中，我们回顾了TOPS的最新技术，包括金属加热器、掺杂硅、硅化物、带有用于隔热的硅衬底底切、折叠波导结构和多程波导结构。我们进一步比较了这些TOPS，并提出了TOPS未来的发展方向。
