Lee Seung Woo, Lee Sin Yong, Choi Garam, Pahk Heui Jae
Opt Express. 2020 Aug 31;28(18):25879-25893. doi: 10.1364/OE.399777.
Spectroscopic snap-shot ellipsometry of co-axial structure is proposed to solve the large spot size and long measurement time issues of the conventional ellipsometer. By modulating the spectroscopic ellipsometry signal into high-frequency at the spectral domain and measuring the spectrum at the point of the back focal plane, the ellipsometry parameters(Δ, ψ) were measured in real-time with small spot size. Detailed analysis, calibration, and optimization process for the proposed methods are presented. The accuracy and precision of the proposed method were confirmed by comparing the thickness measurement result of SiO/Si thin-film samples with a commercial ellipsometer.
提出了同轴结构的光谱快照椭偏仪，以解决传统椭偏仪光斑尺寸大、测量时间长的问题。通过在光谱域将光谱椭偏信号调制为高频，并在背焦平面的点测量光谱，以小光斑尺寸实时测量椭偏参数（Δ，ψ）。给出了所提方法的详细分析、校准和优化过程。通过将SiO/Si薄膜样品的厚度测量结果与商用椭偏仪进行比较，证实了所提方法的准确性和精度。
