Miniature all-fiber force sensor.

A miniature all-fiber Fabry-Perot sensor for measurement of force is presented in this Letter. The sensor consists of a thin silica diaphragm created at the tip of the fiber. The central part of the diaphragm is extended into a silica pole, which is ended with a round-shaped probe or a sensing cylinder apt for asserting measured force. The entire sensor is made of silica glass and has a cylindrical shape with a length of about 800 µm and a diameter of about 105 µm. Force sensing resolution of about 0.6 µN was demonstrated experimentally while providing an unambiguous sensor measurement range of about 0.6 mN. The sensor is shown for measurements of surface tension of liquids and biological samples examination.