Opt Lett. 2020 Sep 15;45(18):5093-5096. doi: 10.1364/OL.401690.
A miniature all-fiber Fabry-Perot sensor for measurement of force is presented in this Letter. The sensor consists of a thin silica diaphragm created at the tip of the fiber. The central part of the diaphragm is extended into a silica pole, which is ended with a round-shaped probe or a sensing cylinder apt for asserting measured force. The entire sensor is made of silica glass and has a cylindrical shape with a length of about 800 µm and a diameter of about 105 µm. Force sensing resolution of about 0.6 µN was demonstrated experimentally while providing an unambiguous sensor measurement range of about 0.6 mN. The sensor is shown for measurements of surface tension of liquids and biological samples examination.
本文提出了一种用于测量力的微型全光纤法布里-珀罗传感器。该传感器由光纤尖端处的薄二氧化硅膜片组成。膜片的中心部分延伸成一个二氧化硅杆，其末端是一个圆形探头或一个适合施加测量力的传感圆柱。整个传感器由二氧化硅玻璃制成，呈圆柱形，长约 800 µm，直径约 105 µm。实验证明，该传感器的力传感分辨率约为 0.6 µN，同时提供了约 0.6 mN 的明确传感器测量范围。该传感器可用于测量液体的表面张力和生物样本的检查。
