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基于HfO的铁电晶体管的频率混合

Frequency Mixing with HfO-Based Ferroelectric Transistors.

作者信息

Mulaosmanovic Halid, Dünkel Stefan, Trentzsch Martin, Beyer Sven, Breyer Evelyn T, Mikolajick Thomas, Slesazeck Stefan

机构信息

NaMLab gGmbH, 01187 Dresden, Germany.

GLOBALFOUNDRIES Fab1 LLC & Co. KG, 01109 Dresden, Germany.

出版信息

ACS Appl Mater Interfaces. 2020 Oct 7;12(40):44919-44925. doi: 10.1021/acsami.0c11155. Epub 2020 Sep 28.

Abstract

Second harmonic generation (SHG) and frequency mixing of electrical signals are fundamental for a wide range of radiofrequency applications. Recently, ferroelectric field-effect transistors (FeFETs), made from ferroelectric hafnium oxide (HfO), have demonstrated promising SHG capabilities because of their unique symmetric transfer curves. In this paper, we illustrate how this symmetry is highly sensitive to material properties by varying the thickness of the ferroelectric layer and the doping of the silicon substrate. We show that the SHG conversion gain and the spectral purity are greatly increased (up to 96%) by precisely tuning the ferroelectric polarization reversal and the quantum tunneling currents. Based on this, we propose and experimentally demonstrate the generation of the difference and of the sum of two input frequencies (frequency mixing) with a single FeFET, which we attribute to the inherently strong quadratic component of the symmetric transfer characteristics. Because of the reversible and continuous ferroelectric switching in HfO, our approach allows for an electrical control of the energy distribution of spectral components, thus opening up new and very promising paths for frequency manipulations with simple ferroelectric devices.

摘要

二次谐波产生(SHG)和电信号的频率混合对于广泛的射频应用至关重要。最近,由铁电氧化铪(HfO)制成的铁电场效应晶体管(FeFET)因其独特的对称传输曲线而展现出了有前景的SHG能力。在本文中,我们通过改变铁电层的厚度和硅衬底的掺杂来阐述这种对称性如何对材料特性高度敏感。我们表明,通过精确调节铁电极化反转和量子隧穿电流,SHG转换增益和光谱纯度大幅提高(高达96%)。基于此,我们提出并通过实验证明了利用单个FeFET产生两个输入频率的差频和和频(频率混合),我们将其归因于对称传输特性中固有的强二次分量。由于HfO中可逆且连续的铁电开关特性,我们的方法允许对光谱分量的能量分布进行电控制,从而为使用简单铁电器件进行频率操纵开辟了新的、非常有前景的途径。

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