Hornig G J, Al-Sumaidae S, Maldaner J, Bu L, DeCorby R G
Opt Express. 2020 Sep 14;28(19):28113-28125. doi: 10.1364/OE.402031.
We describe curved-mirror Fabry-Perot cavities with embedded silicon nitride membranes, fabricated using a monolithic surface-micromachining process. The presence of the suspended membranes was confirmed by confocal microscopy, and their properties were verified through optical studies and thermomechanical calibration of mechanical/vibrational noise spectra measured at room temperature and atmospheric pressure. The cavities exhibit reflectance-limited finesse (F ∼ 10) and wavelength-scale mode volumes (VM ∼ 10·λ). The short cavity length (L ∼ 2·λ) results in large optomechanical coupling, which is desirable for numerous applications in sensing and quantum information.
我们描述了采用单片表面微机械加工工艺制造的、嵌入氮化硅膜的曲面镜法布里 - 珀罗腔。通过共聚焦显微镜确认了悬浮膜的存在，并通过光学研究以及在室温和大气压下测量的机械/振动噪声谱的热机械校准来验证其特性。这些腔展现出反射率限制的精细度（F ∼ 10）和波长尺度的模式体积（VM ∼ 10·λ）。短腔长（L ∼ 2·λ）导致了较大的光机械耦合，这对于传感和量子信息中的众多应用是很理想的。
