Maldaner J, Al-Sumaidae S, Hornig G J, LeBlanc L J, DeCorby R G
Appl Opt. 2020 Aug 10;59(23):7125-7130. doi: 10.1364/AO.399601.
We describe a monolithic approach to fabricating large-scale arrays of high-finesse and low-mode-volume Fabry-Perot microcavities with open access to the air core. A stress-driven buckling self-assembly technique was used to form half-symmetric curved-mirror cavities, and a dry etching process was subsequently used to create micropores through the upper mirror. We show that the cavities retain excellent optical properties, with reflectance-limited finesse ∼2500 and highly predictable Laguerre-Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by microinjection through the pores. Applications in sensing, optofluidics, and cavity quantum electrodynamics are envisioned.
我们描述了一种用于制造具有开放空气芯的大规模高精细度和低模体积法布里 - 珀罗微腔阵列的整体方法。采用应力驱动的屈曲自组装技术形成半对称曲面镜腔，随后通过干法蚀刻工艺在上镜面上制造微孔。我们表明，这些微腔保留了优异的光学特性，反射率限制下的精细度约为2500，并且具有高度可预测的拉盖尔 - 高斯模式。我们还展示了通过微孔进行微注射将液体引入腔区域的能力。预计可应用于传感、光流体学和腔量子电动力学领域。
