Wu Y, Ordonez-Miranda J, Gluchko S, Anufriev R, Meneses D De Sousa, Del Campo L, Volz S, Nomura M
Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
Institut Pprime, CNRS, Université de Poitiers, ISAE-ENSMA, F-86962 Futuroscope Chasseneuil, France.
Sci Adv. 2020 Sep 30;6(40). doi: 10.1126/sciadv.abb4461. Print 2020 Sep.
Improving heat dissipation in increasingly miniature microelectronic devices is a serious challenge, as the thermal conduction in nanostructures is markedly reduced by increasingly frequent scattering of phonons on the surface. However, the surface could become an additional heat dissipation channel if phonons couple with photons forming hybrid surface quasiparticles called surface phonon-polaritons (SPhPs). Here, we experimentally demonstrate the formation of SPhPs on the surface of SiN nanomembranes and subsequent enhancement of heat conduction. Our measurements show that the in-plane thermal conductivity of membranes thinner than 50 nm doubles up as the temperature rises from 300 to 800 kelvin, while thicker membranes show a monotonic decrease. Our theoretical analysis shows that these thickness and temperature dependencies are fingerprints of SPhP contribution to heat conduction. The demonstrated thermal transport by SPhPs can be useful as a previously unidentified channel of heat dissipation in a variety of fields including microelectronics and silicon photonics.
在日益微型化的微电子设备中改善散热是一项严峻挑战，因为随着声子在表面的散射日益频繁，纳米结构中的热传导会显著降低。然而，如果声子与光子耦合形成称为表面声子极化激元（SPhPs）的混合表面准粒子，那么表面就可能成为一个额外的散热通道。在此，我们通过实验证明了在氮化硅纳米膜表面形成SPhPs以及随后热传导的增强。我们的测量结果表明，当温度从300开尔文升至800开尔文时，厚度小于50纳米的膜的面内热导率会翻倍，而较厚的膜则呈单调下降。我们的理论分析表明，这些厚度和温度依赖性是SPhP对热传导贡献的特征。所证明的SPhPs热传输作为一种此前未被识别的散热通道，在包括微电子学和硅光子学在内的各种领域可能会很有用。
