School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China.
Department of Electrical and Electronic Engineering (Joint Appointment with School of Biomedical Sciences), The University of Hong Kong, Pokfulam Road, Hong Kong, China.
ACS Appl Mater Interfaces. 2020 Nov 4;12(44):49748-49754. doi: 10.1021/acsami.0c13144. Epub 2020 Oct 23.
Optical refractometer constitutes the core element for many applications, from determining the purity and concentration of pharmaceutical ingredients to measuring the sugar content in food and beverages, and the analysis of petroleum. Here, we demonstrated the monolithic integration of light-emitting diodes (LEDs) and photodetectors (PDs) to fabricate ultracompact refractometers with a chip size of 475 × 320 μm. The light emission and photodetection properties of the devices containing the same InGaN/GaN multi-quantum wells have been characterized, confirming that the PD can respond to the emission of the LED. The flip-chip assembly of the chip enables the exposed sapphire substrate to be in direct contact with the solution, and the refractive index sensing capability governed by the change of critical angle and Fresnel reflection at the sapphire/solution interface has been investigated. The processing of the optically smooth surface of sapphire and the integration of high-reflectance distributed Bragg reflector beneath the devices facilitate the amount of light received by the PD. The monolithic chip is capable of detecting solutions with a refractive index ranging from 1.3325 to 1.5148 RIU and exhibits a sensitivity of 7.77 μA/RIU and a resolution of 6.4 × 10 RIU at the LED current of 10 mA. Rapid real-time responses of 33.9 ms for rise time and 34.7 ms for fall time are obtained in the detected photocurrent, thereby verifying the feasibility of the chip-scale refractometer.
光学折射计是许多应用的核心元件,从确定药物成分的纯度和浓度到测量食品和饮料中的糖含量,以及石油分析。在这里,我们展示了将发光二极管 (LED) 和光电探测器 (PD) 单片集成,制造出超紧凑的折射计,其芯片尺寸为 475×320μm。对包含相同 InGaN/GaN 多量子阱的器件的发光和光电探测特性进行了表征,证实 PD 可以响应 LED 的发射。芯片的倒装芯片组件使暴露的蓝宝石衬底能够与溶液直接接触,并研究了由蓝宝石/溶液界面处的临界角和菲涅尔反射变化控制的折射率传感能力。蓝宝石的光学光滑表面的处理以及器件下方的高反射分布式布拉格反射器的集成有助于 PD 接收的光量。单片芯片能够检测折射率范围为 1.3325 至 1.5148 RIU 的溶液,在 10 mA 的 LED 电流下,灵敏度为 7.77 μA/RIU,分辨率为 6.4×10 RIU。在检测光电流中获得了 33.9 ms 的上升时间和 34.7 ms 的下降时间的快速实时响应,从而验证了芯片规模折射计的可行性。