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用于NO传感器的具有半导体单壁碳纳米管的大面积柔性印刷薄膜晶体管

Large-Area Flexible Printed Thin-Film Transistors with Semiconducting Single-Walled Carbon Nanotubes for NO Sensors.

作者信息

Wang Xin, Wei Miaomiao, Li Xiaoqian, Shao Shuangshuang, Ren Yunfei, Xu Wenjing, Li Min, Liu Wentao, Liu Xuying, Zhao Jianwen

机构信息

School of Materials Science and Engineering, Zhengzhou University, No. 100 Science Avenue, Zhengzhou, Henan 450001, P. R. China.

Printable Electronics Research Centre, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, No. 398 Ruoshui Road, SEID, Suzhou Industrial Park, Suzhou, Jiangsu Province 215123, PR China.

出版信息

ACS Appl Mater Interfaces. 2020 Nov 18;12(46):51797-51807. doi: 10.1021/acsami.0c13824. Epub 2020 Nov 3.

Abstract

Development of large-area, low-cost, low-voltage, low-power consumption, flexible high-performance printed carbon nanotube thin-film transistors (TFTs) is helpful to promote their future applications in sensors and biosensors, wearable electronics, and the Internet of things. In this work, low-voltage, flexible printed carbon nanotube TFTs with a large-area and low-cost fabrication process were successfully constructed using ultrathin (∼3.6 nm) AlO thin films formed by plasma oxidation of aluminum as dielectrics and screen-printed silver electrodes as contact electrodes. The as-prepared bottom-gate/bottom-contact carbon nanotube TFTs exhibit a low leakage current (∼10 A), a high charge carrier mobility (up to 9.9 cm V s), high on/off ratios (higher than 10), and small subthreshold swings (80-120 mV/dec) at low operation voltages (from -1.5 to 1 V). At the same time, printed carbon nanotube TFTs showed a high response (Δ/ = 99.6%) to NO gas even at 16 ppm with a faster response and recovery speed (∼8 s, exposure to 0.5 ppm NO), a lower detection limit (0.069 ppm NO), and a low power consumption (0.86 μW, exposure to 16 ppm NO) at a gate voltage of 0.2 V at room temperature. Moreover, the printed carbon nanotube devices exhibited excellent mechanical flexibility and bias stress stability after 12,000 bending cycles at a radius of 5 mm and a bias stress test for 7200 s at a gate voltage of ±1 V, which originated from the ultrathin and compact AlO dielectric and the super adhesion force between screen-printed silver electrodes and polyethylene terephthalate substrates.

摘要

开发大面积、低成本、低电压、低功耗、柔性的高性能印刷碳纳米管薄膜晶体管(TFT)有助于推动其未来在传感器和生物传感器、可穿戴电子设备以及物联网中的应用。在这项工作中,利用通过铝的等离子体氧化形成的超薄(约3.6纳米)AlO薄膜作为电介质以及丝网印刷的银电极作为接触电极,成功构建了具有大面积且低成本制造工艺的低电压、柔性印刷碳纳米管TFT。所制备的底栅/底接触碳纳米管TFT在低工作电压(-1.5至1伏)下表现出低漏电流(约10 A)、高电荷载流子迁移率(高达9.9 cm V s)、高开关比(高于10)以及小亚阈值摆幅(80 - 120 mV/dec)。同时,印刷碳纳米管TFT即使在16 ppm的NO气体浓度下也表现出高响应(Δ/ = 99.6%),具有更快的响应和恢复速度(约8秒,暴露于0.5 ppm NO)、更低的检测限(0.069 ppm NO)以及在室温下0.2伏栅极电压下的低功耗(0.86 μW,暴露于16 ppm NO)。此外,印刷碳纳米管器件在半径为5毫米的情况下经过12000次弯曲循环以及在±1伏栅极电压下进行7200秒的偏置应力测试后,表现出优异的机械柔韧性和偏置应力稳定性,这源于超薄且致密的AlO电介质以及丝网印刷银电极与聚对苯二甲酸乙二酯基板之间的超强附着力。

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