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基于薄介电层实现的全印刷柔性碳纳米管薄膜晶体管的低电压操作

Thin dielectric-layer-enabled low-voltage operation of fully printed flexible carbon nanotube thin-film transistors.

作者信息

Chen Jialuo, Mishra Saswat, Vaca Diego, Kumar Nitish, Yeo Woon-Hong, Sitaraman Suresh, Kumar Satish

机构信息

School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta 30332, GA, United States of America.

出版信息

Nanotechnology. 2020 Mar 20;31(23):235301. doi: 10.1088/1361-6528/ab703f. Epub 2020 Jan 27.

Abstract

The quality of printable dielectric layer has become one of the major obstacles to achieving high-performance fully printed transistors. A thick dielectric layer will require high gate voltage to switch the transistors on and off, which will cause high power dissipation in printed devices. In response to this challenge, fully printed carbon nanotube (CNT)-based thin-film transistors (TFTs) have been fabricated on flexible membranes such as polyimide and liquid crystal polymer using aerosol jet printing. These devices can be operated at bias voltages below ±10 V (drain/gate voltages around ±6 V). This is much smaller than the previously reported values for fully printed CNT-TFTs because of using xdi-dcs (mixture of poly(vinylphenol)/poly (methylsilsesquioxane)) as the dielectric and using a single printing method. The lower voltage is a consequence of a thin dielectric layer (∼300 nm) and good uniformity in the printed CNT network. The printed CNT-TFTs show on/off ratio >10, and mobility >5 cmVs. Layer-by-layer deposition of CNT allows highly uniform and dense network formation, and the optimization of the xdi-dcs concentration using natural butyl alcohol provides high-yield printing of a thin dielectric layer. Collectively, this work shows the potential of using fully printed CNT-TFTs in various flexible electronic applications such as wearable sensors, actuators, artificial skin, displays and wireless tags and antennas.

摘要

可印刷介电层的质量已成为实现高性能全印刷晶体管的主要障碍之一。较厚的介电层会需要高栅极电压来开关晶体管,这将导致印刷器件中的高功耗。为应对这一挑战,已使用气溶胶喷射印刷在诸如聚酰亚胺和液晶聚合物等柔性膜上制造了全印刷的基于碳纳米管(CNT)的薄膜晶体管(TFT)。这些器件可以在低于±10 V的偏置电压下工作(漏极/栅极电压约为±6 V)。由于使用xdi-dcs(聚乙烯醇/聚甲基倍半硅氧烷的混合物)作为介电材料并采用单一印刷方法,这比先前报道的全印刷CNT-TFT的值要小得多。较低的电压是由于薄介电层(约300 nm)以及印刷的CNT网络具有良好的均匀性。印刷的CNT-TFT显示出开/关比>10,迁移率>5 cm²V⁻¹s⁻¹。CNT的逐层沉积允许形成高度均匀且致密的网络,并且使用正丁醇优化xdi-dcs浓度可实现薄介电层的高产率印刷。总体而言,这项工作展示了在各种柔性电子应用中使用全印刷CNT-TFT的潜力,例如可穿戴传感器、致动器、人造皮肤、显示器以及无线标签和天线。

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