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ScAlN/GaN异质结的能带对准

Band Alignment of ScAlN/GaN Heterojunctions.

作者信息

Jin Eric N, Hardy Matthew T, Mock Alyssa L, Lyons John L, Kramer Alan R, Tadjer Marko J, Nepal Neeraj, Katzer D Scott, Meyer David J

机构信息

NRC Research Associateship Programs, 500 Fifth Street, Washington, DC 20001, United States.

Electronics Science and Technology Division, U.S. Naval Research Laboratory, 4555 Overlook Avenue, Southwest, Washington, DC 20375, United States.

出版信息

ACS Appl Mater Interfaces. 2020 Nov 18;12(46):52192-52200. doi: 10.1021/acsami.0c15912. Epub 2020 Nov 4.

Abstract

ScAlN is an emergent ultrawide-band-gap material with both a high piezoresponse and demonstrated ferroelectric polarization switching. Recent demonstration of epitaxial growth of ScAlN on GaN has unlocked prospects for new high-power transistors and nonvolatile memory technologies fabricated from these materials. An understanding of the band alignments between ScAlN and GaN is crucial in order to control the electronic and optical properties of engineered devices. To date, there have been no experimental studies of the band offsets between ScAlN and GaN. This work presents optical characterization of the band gap of molecular beam epitaxy grown ScAlN using spectroscopic ellipsometry and measurements of the band offsets of ScAlN with GaN using X-ray photoemission spectroscopy, along with a comparison to first-principles calculations. The band gap is shown to continuously decrease as a function of increasing ScN alloy fraction with a negative bowing parameter. Furthermore, a crossover from straddling (type-I) to staggered (type-II) band offsets is demonstrated as Sc composition increases beyond approximately = 0.11. These results show that the ScAlN/GaN valence band alignment can be tuned by changing the Sc alloy fraction, which can help guide the design of heterostructures in future ScAlN/GaN-based devices.

摘要

氮化钪铝(ScAlN)是一种新兴的超宽带隙材料,具有高的压阻响应和已证实的铁电极化切换特性。近期在氮化镓(GaN)上外延生长氮化钪铝的成果为基于这些材料制造新型高功率晶体管和非易失性存储技术开启了前景。为了控制工程器件的电学和光学特性,了解氮化钪铝与氮化镓之间的能带排列至关重要。迄今为止,尚未有关于氮化钪铝与氮化镓之间能带偏移的实验研究。这项工作利用光谱椭偏仪对分子束外延生长的氮化钪铝的带隙进行了光学表征,并使用X射线光电子能谱测量了氮化钪铝与氮化镓之间的能带偏移,同时与第一性原理计算进行了比较。结果表明,随着氮化钪(ScN)合金分数的增加,带隙呈连续下降趋势,且具有负的弯曲参数。此外,随着钪(Sc)成分增加超过约 = 0.11,能带偏移从跨越型(I型)转变为交错型(II型)。这些结果表明,可以通过改变钪合金分数来调整氮化钪铝/氮化镓的价带排列,这有助于指导未来基于氮化钪铝/氮化镓器件的异质结构设计。

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