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分子束外延生长的GaN纳米线p-n结中掺杂顺序效应的研究。

Investigation of the effect of the doping order in GaN nanowire p-n junctions grown by molecular-beam epitaxy.

作者信息

Saket Omar, Wang Junkang, Amador-Mendez Nuño, Morassi Martina, Kunti Arup, Bayle Fabien, Collin Stéphane, Jollivet Arnaud, Babichev Andrey, Sodhi Tanbir, Harmand Jean-Christophe, Julien François H, Gogneau Noelle, Tchernycheva Maria

机构信息

Centre de Nanosciences et de Nanotechnologies (C2N), UMR 9001 CNRS, Université Paris Saclay, 91120 Palaiseau, France.

ITMO University, 197101 St. Petersburg, Russia.

出版信息

Nanotechnology. 2021 Feb 19;32(8):085705. doi: 10.1088/1361-6528/abc91a.

Abstract

We analyse the electrical and optical properties of single GaN nanowire p-n junctions grown by plasma-assisted molecular-beam epitaxy using magnesium and silicon as doping sources. Different junction architectures having either a n-base or a p-base structure are compared using optical and electrical analyses. Electron-beam induced current (EBIC) microscopy of the nanowires shows that in the case of a n-base p-n junction the parasitic radial growth enhanced by the magnesium (Mg) doping leads to a mixed axial-radial behaviour with strong wire-to-wire fluctuations of the junction position and shape. By reverting the doping order p-base p-n junctions with a purely axial well-defined structure and a low wire-to-wire dispersion are achieved. The good optical quality of the top n nanowire segment grown on a p-doped stem is preserved. A hole concentration in the p-doped segment exceeding 10 cm was extracted from EBIC mapping and photoluminescence analyses. This high concentration is reached without degrading the nanowire morphology.

摘要

我们分析了通过等离子体辅助分子束外延生长的、以镁和硅作为掺杂源的单根氮化镓纳米线p-n结的电学和光学性质。使用光学和电学分析方法,比较了具有n型基极或p型基极结构的不同结结构。纳米线的电子束诱导电流(EBIC)显微镜显示,在n型基极p-n结的情况下,由镁(Mg)掺杂增强的寄生径向生长导致了轴向-径向混合行为,结位置和形状存在强烈的线间波动。通过颠倒掺杂顺序,实现了具有纯轴向明确结构和低线间分散的p型基极p-n结。生长在p掺杂茎上的顶部n型纳米线段具有良好的光学质量。从EBIC映射和光致发光分析中提取出p掺杂段中的空穴浓度超过10¹⁹ cm⁻³。在不降低纳米线形态的情况下达到了这种高浓度。

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