Pruiti Natale G, Klitis Charalambos, Gough Christopher, May Stuart, Sorel Marc
Opt Lett. 2020 Nov 15;45(22):6242-6245. doi: 10.1364/OL.403357.
The thermo-optic coefficient (TOC) of photonic integrated waveguides fabricated on silicon-rich silicon nitride grown by plasma-enanched chemical vapor deposition is characterized for the first time, to the best of our knowledge. The TOC is found to increase linearly with the fractional composition of silicon over a range from that of silicon nitride to a-Si. This finding is significant for improving the power efficiency of thermally tuned photonic integrated circuits.
据我们所知，首次对通过等离子体增强化学气相沉积生长的富硅氮化硅上制备的光子集成波导的热光系数（TOC）进行了表征。结果发现，在从氮化硅到非晶硅的范围内，热光系数随硅的分数组成线性增加。这一发现对于提高热调谐光子集成电路的功率效率具有重要意义。
