Jo Seungju, Kim Inkyum, Jayababu Nagabandi, Kim Daewon
Department of Electronic Engineering, Institute for Wearable Convergence Electronics, Kyung Hee University, 1732 Deogyeong-daero, Giheung-gu, Yongin 17104, Korea.
Polymers (Basel). 2020 Nov 29;12(12):2854. doi: 10.3390/polym12122854.
Recently, studies on enhancing the performance of triboelectric nanogenerators (TENGs) by forming nanostructures at the contacting interface have been actively reported. In this study, a double-layered bottom electrode TENG (DE-TENG) was successfully fabricated using a metal deposition layer after the water-assisted oxidation (WAO) process. As previously reported, the WAO process for the enhancement of electrical performance increases the effective contact area with an inherent surface oxidation layer (AlO). As a new approach for modifying deficiencies in the WAO process, a metal deposition onto the oxidation layer was successfully developed with increased device output performance by restoring the surface conductivity. The proposed metal-dielectric-metal sandwich-structured DE-TENG generated approximately twice the electrical output generated by the WAO process alone (WAO-TENG). This dramatically improved electrical output was proven by a theoretical demonstration based on a double capacitance structure. In addition, the double capacitance structure was confirmed with the aid of a field emission scanning electron microscope. The optimal point at which the DE-TENG generates the highest electrical outputs was observed at a specific Cu layer sputtering time. The exceptional durability of the DE-TENG was proved by the 1 h endurance test under various relative humidity conditions. The potential of a self-powered force sensor using this DE-TENG is demonstrated, having a comparably high sensitivity of 0.82 V/N. Considering its structure, increased electrical energy, easy fabrication, and its durability, this novel DE-TENG is a promising candidate for the self-powered energy harvesting technology in our near future.
最近，关于通过在接触界面形成纳米结构来提高摩擦纳米发电机（TENGs）性能的研究已有大量报道。在本研究中，通过水辅助氧化（WAO）工艺后沉积金属层，成功制备了一种双层底部电极TENG（DE-TENG）。如先前报道，用于提高电性能的WAO工艺通过增加与固有表面氧化层（AlO）的有效接触面积来实现。作为改进WAO工艺缺陷的一种新方法，通过恢复表面导电性，成功开发了一种在氧化层上沉积金属的方法，提高了器件的输出性能。所提出的金属-电介质-金属三明治结构的DE-TENG产生的电输出约为仅采用WAO工艺的TENG（WAO-TENG）的两倍。基于双电容结构的理论论证证明了这种显著提高的电输出。此外，借助场发射扫描电子显微镜确认了双电容结构。在特定的铜层溅射时间观察到DE-TENG产生最高电输出的最佳点。在各种相对湿度条件下进行的1小时耐久性测试证明了DE-TENG具有出色的耐久性。展示了使用这种DE-TENG的自供电力传感器的潜力，其具有相当高的灵敏度，为0.82 V/N。考虑到其结构、增加的电能、易于制造及其耐久性，这种新型DE-TENG在不久的将来是自供电能量收集技术的一个有前途的候选者。
