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基于窄沟道开栅AlGaN/GaN高电子迁移率晶体管和封装集成聚二甲基硅氧烷微通道的低功耗pH传感器。

Low-Power pH Sensor Based on Narrow Channel Open-Gated AlGaN/GaN HEMT and Package Integrated Polydimethylsiloxane Microchannels.

作者信息

Yang Xianghong, Ao Jiapei, Wu Sichen, Ma Shenhui, Li Xin, Hu Long, Liu Weihua, Han Chuanyu

机构信息

School of Microelectronics, Xi'an Jiaotong University, Xi'an 710049, China.

出版信息

Materials (Basel). 2020 Nov 22;13(22):5282. doi: 10.3390/ma13225282.

DOI:10.3390/ma13225282
PMID:33266399
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7700280/
Abstract

pH sensors with low-power and strong anti-interference are extremely important for industrial online real-time detection. Herein, a narrow channel pH sensor based on AlGaN/GaN high electron mobility transistor (HEMT) with package integrated Polydimethylsiloxane (PDMS) microchannels is proposed. The fabricated device has shown potential advantages in improving stability and reducing power consumption in response to pH changes of the solution. The performance of the pH sensor was demonstrated where the preliminary results showed an ultra-low power (<5.0 μW) at = 1.0 V. Meanwhile, the sensitivity was 0.06 μA/V·pH in the range of pH = 2 to pH = 10, and the resolution of the sensor was 0.1 pH. The improvement in performance of the proposed sensor can be related to the narrow channel and microchannel, which can be attributed to better surface GaO in a microchannel with larger H and HO concentration on the sensing surface during the detection process. The low-power sensor with excellent stability can be widely used in various unattended or harsh environments, and it is more conducive to integration and intelligence, which lays the foundation for online monitoring in vivo.

摘要

低功耗且抗干扰能力强的pH传感器对于工业在线实时检测极为重要。在此，提出了一种基于AlGaN/GaN高电子迁移率晶体管（HEMT）且封装集成聚二甲基硅氧烷（PDMS）微通道的窄通道pH传感器。所制备的器件在响应溶液pH变化时，在提高稳定性和降低功耗方面展现出潜在优势。对pH传感器的性能进行了演示，初步结果表明在 = 1.0 V时功耗超低（<5.0 μW）。同时，在pH = 2至pH = 10范围内灵敏度为0.06 μA/V·pH，传感器分辨率为0.1 pH。所提出传感器性能的提升与窄通道和微通道有关，这可归因于在检测过程中传感表面具有较大H和HO浓度的微通道中更好的表面GaO。具有出色稳定性的低功耗传感器可广泛应用于各种无人值守或恶劣环境，且更有利于集成和智能化，为体内在线监测奠定了基础。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/4816bdec7a4e/materials-13-05282-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/debeb279fe28/materials-13-05282-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/bf5eb5d7a4ee/materials-13-05282-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/d7f7acced497/materials-13-05282-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/90b7c0b68430/materials-13-05282-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/99bd2456d37b/materials-13-05282-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/adab4780f564/materials-13-05282-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/371df20bb73b/materials-13-05282-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/a85240b766f6/materials-13-05282-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/96fd63550660/materials-13-05282-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/4816bdec7a4e/materials-13-05282-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/debeb279fe28/materials-13-05282-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/bf5eb5d7a4ee/materials-13-05282-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/d7f7acced497/materials-13-05282-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/90b7c0b68430/materials-13-05282-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/99bd2456d37b/materials-13-05282-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/adab4780f564/materials-13-05282-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/371df20bb73b/materials-13-05282-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/a85240b766f6/materials-13-05282-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/96fd63550660/materials-13-05282-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03ea/7700280/4816bdec7a4e/materials-13-05282-g010.jpg

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