Sun Yan, Liu Jing, Wang Kejian, Wei Zheng
College of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing 100029, China.
Scanning. 2020 Nov 13;2020:8818542. doi: 10.1155/2020/8818542. eCollection 2020.
During the operation of tapping mode atomic force microscope (TM-AFM), the gap between the cantilever and sample surface is very small (several nanometers to micrometers). Owing to the small gap distance and high vibration frequency, squeeze film force should be considered in TM-AFM. To explore the mechanism of squeeze film damping in TM-AFM, three theoretical microcantilever simplified models are discussed innovatively herein: tip probe, ball probe, and tipless probe. Experiments and simulations are performed to validate the theoretical models. It is of great significance to improve the image quality of atomic force microscope.
在轻敲模式原子力显微镜（TM-AFM）操作过程中，悬臂与样品表面之间的间隙非常小（几纳米到几微米）。由于间隙距离小且振动频率高，在TM-AFM中应考虑挤压膜力。为了探究TM-AFM中挤压膜阻尼的机制，本文创新性地讨论了三种理论微悬臂梁简化模型：尖探针、球探针和无尖探针。进行了实验和模拟以验证理论模型。这对于提高原子力显微镜的图像质量具有重要意义。
