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使用涂覆聚合物薄膜的高频石英晶体微天平提高气体传感器阵列的分辨能力。

Discrimination Improvement of a Gas Sensors' Array Using High-Frequency Quartz Crystal Microbalance Coated with Polymeric Films.

机构信息

Facultad de Ciencias Físico-Matemáticas, Benemérita Universidad Autónoma de Puebla, Av. San Claudio y Río Verde, Col. San Manuel, CU, C.P. 72570 Puebla, Mexico.

出版信息

Sensors (Basel). 2020 Dec 6;20(23):6972. doi: 10.3390/s20236972.

Abstract

The discrimination improvement of an array of four highly sensitive 30 MHz gas quartz crystal microbalance (QCM) sensors was performed and compared to a similar system based on a 12-MHz QCM. The sensing polymeric films were ethyl cellulose (EC), poly-methyl methacrylate (PMMA), Apiezon L (ApL), and Apiezon T (ApT) and they were coated over the AT-cut QCM devices by the drop casting technique. All the sensors had almost the same film thickness (0.2 μm). The fabricated QCM sensor arrays were exposed to three different concentrations, corresponding to 5, 10, and 15 μL, of ethanol, ethyl acetate, and heptane vapors. The steady state sensor responses were measured in a static system at a temperature of 20 °C and relative humidity of 22%. Our results showed that the 30-MHz sensors have a higher sensitivity than 12-MHz ones (around 5.73 times), independently of the sensing film and measured sample. On the other hand, principal component analysis and discriminant analysis were performed using the raw data of the responses. An improvement of the classification percentage between 12 MHz and 30 MHz sensors was found. However, it was not sufficient, especially for low concentrations. Furthermore, using partition coefficient and discriminant analysis (DA), an improvement of 100% classification of the three samples was achieved for the case of the 30-MHz sensor array.

摘要

对四个高灵敏度 30MHz 气体石英晶体微天平(QCM)传感器的阵列进行了分辨力改善,并与基于 12MHz QCM 的类似系统进行了比较。传感聚合物薄膜为乙基纤维素(EC)、聚甲基丙烯酸甲酯(PMMA)、Apiezon L(ApL)和 Apiezon T(ApT),它们通过滴铸技术涂覆在 AT 切 QCM 器件上。所有传感器的膜厚几乎相同(0.2μm)。所制造的 QCM 传感器阵列分别暴露于三种不同浓度(对应于 5、10 和 15μL 的乙醇、乙酸乙酯和庚烷蒸气)。在温度为 20°C 和相对湿度为 22%的静态系统中测量传感器的稳态响应。结果表明,30MHz 传感器的灵敏度高于 12MHz 传感器(约 5.73 倍),与传感膜和测量样品无关。另一方面,使用响应的原始数据进行了主成分分析和判别分析。发现 12MHz 和 30MHz 传感器之间的分类百分比有所提高。然而,对于低浓度,提高程度并不足够。此外,对于 30MHz 传感器阵列,使用分配系数和判别分析(DA),可以实现对三种样品的 100%分类。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2fdb/7730943/12f061e307a9/sensors-20-06972-g001.jpg

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