Huang Xianhe, Bai Qingsong, Hu Jianguo, Hou Dong
School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.
Sensors (Basel). 2017 Aug 3;17(8):1785. doi: 10.3390/s17081785.
A practical model of quartz crystal microbalance (QCM) is presented, which considers both the Gaussian distribution characteristic of mass sensitivity and the influence of electrodes on the mass sensitivity. The equivalent mass sensitivity of 5 MHz and 10 MHz AT-cut QCMs with different sized electrodes were calculated according to this practical model. The equivalent mass sensitivity of this practical model is different from the Sauerbrey's mass sensitivity, and the error between them increases sharply as the electrode radius decreases. A series of experiments which plate rigid gold film onto QCMs were carried out and the experimental results proved this practical model is more valid and correct rather than the classical Sauerbrey equation. The practical model based on the equivalent mass sensitivity is convenient and accurate in actual measurements.
提出了一种石英晶体微天平(QCM)的实用模型,该模型既考虑了质量灵敏度的高斯分布特性,又考虑了电极对质量灵敏度的影响。根据该实用模型计算了不同尺寸电极的5MHz和10MHz AT切QCM的等效质量灵敏度。该实用模型的等效质量灵敏度与索布尔雷质量灵敏度不同,且随着电极半径减小,两者之间的误差急剧增大。进行了一系列在QCM上镀硬金膜的实验,实验结果证明该实用模型比经典的索布尔雷方程更有效、更正确。基于等效质量灵敏度的实用模型在实际测量中方便且准确。