基于二维模式耦合理论的不同分布质量负载声表面波传感器仿真

Simulation of SAW Sensors with Various Distributed Mass Loadings Using Two-Dimensional Coupling-of-Modes Theory.

作者信息

You Ran, Liu Jiuling, Liu Minghua, Chen Zhiyuan, He Shitang

机构信息

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2020 Dec 18;20(24):7260. doi: 10.3390/s20247260.

DOI:10.3390/s20247260

PMID:33352822

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7765811/

Abstract

In order to accurately investigate the disturbance of complex distributed mass loading on surface acoustic wave (SAW) propagation characteristics, two-dimensional coupling-of-modes (2-D COM) theory and finite element method (FEM) were used to simulate the responses of SAW sensors. By using the PDE mode of FEM software, four SAW resonators with the loads in different distribution patterns were modeled. Also, we fabricated and measured a series of SAW resonators accordingly. The results showed that the 2-D COM theory combined with the finite element method was able to simulate the transverse modes of the device and the disturbance of the mass loading on the transverse mode effectively, making the simulation more accurate.

摘要

为了准确研究复杂分布质量负载对表面声波（SAW）传播特性的干扰，采用二维模式耦合（2-D COM）理论和有限元方法（FEM）来模拟SAW传感器的响应。通过使用有限元软件的偏微分方程（PDE）模式，对四种具有不同分布模式负载的SAW谐振器进行了建模。此外，我们相应地制作并测量了一系列SAW谐振器。结果表明，二维模式耦合理论与有限元方法相结合能够有效地模拟器件的横向模式以及质量负载对横向模式的干扰，从而使模拟更加准确。