相位噪声对微机电系统磁盘谐振器陀螺仪接口电路影响的研究

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit.

作者信息

Zhang Wenbo, Chen Weiping, Yin Liang, Di Xinpeng, Chen Dongliang, Fu Qiang, Zhang Yufeng, Liu Xiaowei

机构信息

MEMS Center, Harbin Institute of Technology, Harbin 150000, China.

Key Laboratory of Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150000, China.

出版信息

Sensors (Basel). 2020 Sep 24;20(19):5470. doi: 10.3390/s20195470.

DOI:10.3390/s20195470

PMID:32987751

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7582517/

Abstract

In this paper, a detailed analysis of the influence of phase noise on the micro-electro-mechanical system (MEMS) disk resonator gyroscope (DRG) is presented. Firstly, a new time-varying phase noise model for the gyroscope is established, which explains how the drive loop circuit noise converts into phase noise. Different from previous works, the time-varying phase noise model in this paper is established in mechanical domain, which gain more physical insight into the origin of the phase noise in gyroscope. Furthermore, the impact of phase noise on DRG is derived, which shows how the phase noise affects angular velocity measurement. The analysis shows that, in MEMS DRG, the phase noise, together with other non-ideal factors such as direct excitation of secondary resonator, may cause a low frequency noise in the output of the gyroscope system and affect the bias stability of the gyroscope. Finally, numerical simulations and experiment tests are designed to prove the theories above.

摘要

本文详细分析了相位噪声对微机电系统（MEMS）磁盘谐振器陀螺仪（DRG）的影响。首先，建立了一种新的陀螺仪时变相位噪声模型，该模型解释了驱动环路电路噪声如何转换为相位噪声。与以往的工作不同，本文的时变相位噪声模型是在机械领域建立的，这使得对陀螺仪中相位噪声的起源有了更深入的物理理解。此外，推导了相位噪声对DRG的影响，展示了相位噪声如何影响角速度测量。分析表明，在MEMS DRG中，相位噪声与其他非理想因素（如二次谐振器的直接激励）一起，可能会在陀螺仪系统的输出中引起低频噪声，并影响陀螺仪的偏置稳定性。最后，设计了数值模拟和实验测试来验证上述理论。