Xia Dunzhu, Huang Lingchao, Xu Lei, Gao Haiyu
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
Micromachines (Basel). 2017 Sep 30;8(10):296. doi: 10.3390/mi8100296.
In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q). The structure parameters, which can affect the frequency split and Q value were concluded with the help of the FEM software. Meanwhile, devices with different parameters were designed, fabricated, and tested, and the experimental result was in accordance with the simulation. With the proposed methods, the DRG was selected with a high Q value and a low frequency split to satisfy the demand of high performance. The weakness and future works were pointed at last.
在本文中,我们提出了两种提高盘式谐振器陀螺仪(DRG)性能的设计方法,包括减小频率分裂和提高品质因数(Q)。借助有限元软件得出了会影响频率分裂和Q值的结构参数。同时,设计、制造并测试了具有不同参数的器件,实验结果与模拟结果相符。采用所提出的方法,选择了具有高Q值和低频率分裂的DRG以满足高性能需求。最后指出了不足之处和未来的工作。