用于硬X射线纳米聚焦镜波前测量与校正的X射线单光栅干涉测量法

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors.

作者信息

Yamada Jumpei, Inoue Takato, Nakamura Nami, Kameshima Takashi, Yamauchi Kazuto, Matsuyama Satoshi, Yabashi Makina

机构信息

RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan.

Division of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

出版信息

Sensors (Basel). 2020 Dec 21;20(24):7356. doi: 10.3390/s20247356.

DOI:10.3390/s20247356

PMID:33371522

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7767480/

Abstract

X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than /72 in root-mean-square value.

摘要

X射线单光栅干涉测量法被用于对硬X射线纳米聚焦镜进行精确的波前校正。仔细研究了干涉仪中源自光栅、探测器以及部件对准误差的系统误差。基于测得的波前误差，使用差分沉积技术直接校正镜面形状。数值孔径为0.01的校正后的X射线聚焦镜实现了二维衍射极限性能。校正结果表明，波前测量的不确定度在均方根值上小于λ/72。