Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-1871, Japan.
J Phys Condens Matter. 2011 Oct 5;23(39):394206. doi: 10.1088/0953-8984/23/39/394206. Epub 2011 Sep 15.
We have constructed an extremely precise optical system for hard-x-ray nanofocusing in a synchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, and employed as Kirkpatrick-Baez mirrors with a novel phase error compensator. In the phase compensator, an at-wavelength wavefront error sensing method based on x-ray interferometry and an in situ phase compensator mirror, which adaptively deforms with nanometer precision, were developed to satisfy the Rayleigh criterion to achieve diffraction-limited focusing in a single-nanometer range. The performance of the optics was tested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately 7 nm.
我们构建了一套用于同步辐射光束线中硬 X 射线纳米聚焦的极其精确的光学系统。我们制造、测试了精密多层反射镜，并将其用作具有新型相误差补偿器的 Kirkpatrick-Baez 反射镜。在相补偿器中，我们开发了一种基于 X 射线干涉测量法的工作波长波前误差感应方法和一个原位相补偿镜，它可以以纳米级的精度自适应变形，以满足瑞利判据，从而在单纳米范围内实现衍射极限聚焦。该光学系统的性能在 SPring-8 的 BL29XUL 上进行了测试，并证实其光斑尺寸约为 7nm。
