使用波前校正多层聚焦镜对X射线自由电子激光进行纳米聚焦
Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors.
作者信息
Matsuyama S, Inoue T, Yamada J, Kim J, Yumoto H, Inubushi Y, Osaka T, Inoue I, Koyama T, Tono K, Ohashi H, Yabashi M, Ishikawa T, Yamauchi K
机构信息
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan.
Pohang Accelerator Laboratory, Pohang, Gyeongbuk, 37673, Republic of Korea.
出版信息
Sci Rep. 2018 Nov 28;8(1):17440. doi: 10.1038/s41598-018-35611-0.
A method of fabricating multilayer focusing mirrors that can focus X-rays down to 10 nm or less was established in this study. The wavefront aberration induced by multilayer Kirkpatrick-Baez mirror optics was measured using a single grating interferometer at a photon energy of 9.1 keV at SPring-8 Angstrom Compact Free Electron Laser (SACLA), and the mirror shape was then directly corrected by employing a differential deposition method. The accuracies of these processes were carefully investigated, considering the accuracy required for diffraction-limited focusing. The wavefront produced by the corrected multilayer focusing mirrors was characterized again in the same manner, revealing that the root mean square of the wavefront aberration was improved from 2.7 (3.3) rad to 0.52 (0.82) rad in the vertical (horizontal) direction. A wave-optical simulator indicated that these wavefront-corrected multilayer focusing mirrors are capable of achieving sub-10-nm X-ray focusing.
本研究建立了一种制造多层聚焦镜的方法，该聚焦镜可将X射线聚焦至10纳米或更小。在SPring-8埃紧凑型自由电子激光装置（SACLA）上，使用单光栅干涉仪在9.1千电子伏特的光子能量下测量了多层柯克帕特里克-贝兹镜光学系统引起的波前像差，然后采用差分沉积法直接校正镜面形状。考虑到衍射极限聚焦所需的精度，对这些过程的精度进行了仔细研究。以相同方式再次表征了经校正的多层聚焦镜产生的波前，结果表明，波前像差的均方根在垂直（水平）方向上从2.7（3.3）弧度提高到了0.52（0.82）弧度。一个波光学模拟器表明，这些波前校正后的多层聚焦镜能够实现亚10纳米的X射线聚焦。
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