通过激光薄膜局部蒸发形成基于表面声波的惯性传感器的复杂拓扑结构。

Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation.

作者信息

Kukaev Alexander, Lukyanov Dmitry, Mikhailenko Denis, Safronov Daniil, Shevchenko Sergey, Venediktov Vladimir, Vlasov Andrey

机构信息

Department of Laser Measurement and Navigation Systems, St. Petersburg State Electrotechnical University, 197022 St. Petersburg, Russia.

Department of Physics, St. Petersburg State University, 197022 St. Petersburg, Russia.

出版信息

Micromachines (Basel). 2020 Dec 24;12(1):10. doi: 10.3390/mi12010010.

DOI:10.3390/mi12010010

PMID:33374378

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7824206/

Abstract

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

摘要

最初，基于表面声波的传感器是使用光刻技术制造的，当研究需要小批量甚至单个元件时，这会变得极其昂贵。提出了一种激光薄膜局部蒸发技术，以替代基于表面声波的惯性传感器原型生产中的光刻工艺。为了评估其潜力，制造并测试了一个表面声波陀螺仪传感元件的原型。结果表明，频率失配不超过1%，但波在小惯性质量上的色散会导致接收电极上出现寄生杂散信号。文中讨论了忽略该信号的可能方法。