Aleksandrova Mariya, Badarov Dimiter
Department of Microelectronics, Technical University of Sofia, 1000 Sofia, Bulgaria.
Department of Electronics, Technical University of Sofia, 1000 Sofia, Bulgaria.
Sensors (Basel). 2022 Jun 29;22(13):4917. doi: 10.3390/s22134917.
In this paper, we present an overview of the latest achievements in surface acoustic wave (SAW) sensors for gas or liquid fluid, with a focus on the electrodes' topology and signal processing, as related to the application of the sensing device. Although the progress in this field is mainly due to advances in the materials science and the sensing coatings, the interdigital (IDT) electrodes' organization is also an important tool for setting the acoustic-wave-distribution mode, and, thus, for improvement of the SAW performance. The signal-conditioning system is of practical interest, as the implementation of the SAW, as a compact and mobile system is dependent on this electronic circuit. The precision of the detection of the SAW platform is related not only to the IDT electrodes' geometry but also to their location around the sensing layer. The most commonly used architectures are shown in the present paper. Finally, we identify the needs for the future improvement of these prospective sensors.
在本文中,我们概述了用于气体或液体流体的表面声波(SAW)传感器的最新成果,重点关注与传感装置应用相关的电极拓扑结构和信号处理。尽管该领域的进展主要归功于材料科学和传感涂层的进步,但叉指(IDT)电极的布局也是设定声波分布模式的重要工具,从而有助于提高SAW性能。信号调理系统具有实际意义,因为SAW作为一种紧凑且可移动的系统,其实现依赖于该电子电路。SAW平台的检测精度不仅与IDT电极的几何形状有关,还与它们在传感层周围的位置有关。本文展示了最常用的架构。最后,我们确定了这些前瞻性传感器未来改进的需求。