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分子束外延生长自辅助砷化镓纳米线的纤锌矿相控制

Wurtzite phase control for self-assisted GaAs nanowires grown by molecular beam epitaxy.

作者信息

Dursap T, Vettori M, Botella C, Regreny P, Blanchard N, Gendry M, Chauvin N, Bugnet M, Danescu A, Penuelas J

机构信息

Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France.

Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Institut Lumière Matière, F-69622 Villeurbanne, France.

出版信息

Nanotechnology. 2021 Apr 9;32(15):155602. doi: 10.1088/1361-6528/abda75.

Abstract

The accurate control of the crystal phase in III-V semiconductor nanowires (NWs) is an important milestone for device applications. Although cubic zinc-blende (ZB) GaAs is a well-established material in microelectronics, the controlled growth of hexagonal wurtzite (WZ) GaAs has thus far not been achieved successfully. Specifically, the prospect of growing defect-free and gold catalyst-free wurtzite GaAs would pave the way towards integration on silicon substrate and new device applications. In this article, we present a method to select and maintain the WZ crystal phase in self-assisted NWs by molecular beam epitaxy. By choosing a specific regime where the NW growth process is a self-regulated system, the main experimental parameter to select the ZB or WZ phase is the V/III flux ratio. Using an analytical growth model, we show that the V/III flux ratio can be finely tuned by changing the As flux, thus driving the system toward a stationary regime where the wetting angle of the Ga droplet can be maintained in the range of values allowing the formation of pure WZ phase. The analysis of the in situ reflection high energy electron diffraction evolution, combined with high-resolution scanning transmission electron microscopy (TEM), dark field TEM, and photoluminescence all confirm the control of an extended pure WZ segment, more than a micrometer long, obtained by molecular beam epitaxy growth of self- assisted GaAs NWs with a V/III flux ratio of 4.0. This successful controlled growth of WZ GaAs suggests potential benefits for electronics and opto-electronics applications.

摘要

精确控制III-V族半导体纳米线(NWs)中的晶相是器件应用的一个重要里程碑。尽管立方闪锌矿(ZB)结构的GaAs是微电子领域一种成熟的材料,但迄今为止,六角纤锌矿(WZ)结构GaAs的可控生长尚未成功实现。具体而言,生长无缺陷且无金催化剂的纤锌矿GaAs有望为在硅衬底上的集成以及新器件应用铺平道路。在本文中,我们展示了一种通过分子束外延在自辅助纳米线中选择并维持WZ晶相的方法。通过选择纳米线生长过程为自调节系统的特定条件,选择ZB或WZ相的主要实验参数是V/III通量比。使用一个解析生长模型,我们表明可以通过改变As通量来精细调节V/III通量比,从而将系统驱动到一个稳定状态,在该状态下Ga液滴的润湿角可以维持在允许形成纯WZ相的数值范围内。原位反射高能电子衍射演化分析,结合高分辨率扫描透射电子显微镜(TEM)、暗场TEM和光致发光,均证实了通过分子束外延生长具有4.0的V/III通量比的自辅助GaAs纳米线获得了超过一微米长的扩展纯WZ段的控制。WZ GaAs的这种成功的可控生长表明了其在电子和光电子应用中的潜在优势。

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