Corletto Alexander, Shapter Joseph G
Australian Institute for Bioengineering and Nanotechnology The University of Queensland Brisbane Queensland 4072 Australia.
Adv Sci (Weinh). 2020 Nov 23;8(1):2001778. doi: 10.1002/advs.202001778. eCollection 2020 Jan.
Carbon nanotube (CNT) devices and electronics are achieving maturity and directly competing or surpassing devices that use conventional materials. CNTs have demonstrated ballistic conduction, minimal scaling effects, high current capacity, low power requirements, and excellent optical/photonic properties; making them the ideal candidate for a new material to replace conventional materials in next-generation electronic and photonic systems. CNTs also demonstrate high stability and flexibility, allowing them to be used in flexible, printable, and/or biocompatible electronics. However, a major challenge to fully commercialize these devices is the scalable placement of CNTs into desired micro/nanopatterns and architectures to translate the superior properties of CNTs into macroscale devices. Precise and high throughput patterning becomes increasingly difficult at nanoscale resolution, but it is essential to fully realize the benefits of CNTs. The relatively long, high aspect ratio structures of CNTs must be preserved to maintain their functionalities, consequently making them more difficult to pattern than conventional materials like metals and polymers. This review comprehensively explores the recent development of innovative CNT patterning techniques with nanoscale lateral resolution. Each technique is critically analyzed and applications for the nanoscale-resolution approaches are demonstrated. Promising techniques and the challenges ahead for future devices and applications are discussed.
碳纳米管（CNT）器件和电子产品正日趋成熟，并直接与使用传统材料的器件展开竞争，甚至超越了这些器件。碳纳米管已展现出弹道传导、极小的缩放效应、高电流容量、低功耗要求以及出色的光学/光子特性；这使其成为下一代电子和光子系统中替代传统材料的理想新材料候选者。碳纳米管还具有高稳定性和柔韧性，使其能够用于柔性、可印刷和/或生物相容性电子器件。然而，要使这些器件完全商业化，一个主要挑战是将碳纳米管可扩展地放置到所需的微/纳米图案和结构中，以便将碳纳米管的优异性能转化为宏观器件的性能。在纳米级分辨率下，精确且高通量的图案化变得越来越困难，但这对于充分实现碳纳米管的优势至关重要。碳纳米管相对较长的高纵横比结构必须得以保留以维持其功能，因此与金属和聚合物等传统材料相比，对其进行图案化更加困难。本综述全面探讨了具有纳米级横向分辨率的创新碳纳米管图案化技术的最新进展。对每种技术进行了批判性分析，并展示了纳米级分辨率方法的应用。讨论了有前景的技术以及未来器件和应用面临的挑战。
