Akshya S, Juliet A Vimala
Department of Electronics and Instrumentation Engineering, SRM Institute of Science and Technology, Kattankulathur 603203, Tamil Nadu, India.
Sci Rep. 2021 Jan 13;11(1):970. doi: 10.1038/s41598-020-78586-7.
In this paper we discussed, nitrogen oxides gas sensors are designed and simulated using the MEMS-based tool of COMSOL Multiphysics software. Pd-rGO composite films were designed and their NO sensing characteristics were investigated in this study by comparing with/without active layers. Transition metal SnO deals with four different active materials i.e., Pure SnO, SnO-Pd, SnO-rGO, and SnO-Pd/rGO film was controlled by altering the active materials during the active layer deposition. The deposition of Pd/rGO active material is integrated into the SnO thin film. The response of the nanocomposite materials on the NO gas sensor at a low temperature below 100 °C was significantly improved. Moreover, we investigate the optimization from different active layer response for NO by applying power in watt and milliwatt to the interdigitated electrode on the Sn substrate. The determination is tense to finalize the suitable materials that to detect more response for nitrogen oxides i.e., Pd/rGO layer shows better performance when compared with other active layers for the sensing of nitrogen oxides is in proportion to the power in the range of 0.6-4.8 W at (1-8) Voltage range. This advanced research will enable a new class of portable NO gas sensors to be constructed with millimeter size and microwatt power.
在本文中，我们讨论了使用基于微机电系统（MEMS）的COMSOL Multiphysics软件工具设计和模拟氮氧化物气体传感器。本研究设计了钯-还原氧化石墨烯（Pd-rGO）复合薄膜，并通过与有无活性层的情况进行比较来研究其对一氧化氮（NO）的传感特性。过渡金属氧化锡（SnO）涉及四种不同的活性材料，即纯SnO、SnO-Pd、SnO-rGO和SnO-Pd/rGO薄膜，在活性层沉积过程中通过改变活性材料来进行控制。Pd/rGO活性材料的沉积被整合到SnO薄膜中。纳米复合材料在低于100°C的低温下对NO气体传感器的响应得到了显著改善。此外，我们通过向Sn衬底上的叉指电极施加以瓦特和毫瓦为单位的功率，研究了不同活性层对NO响应的优化。确定合适的材料以检测对氮氧化物有更多响应的工作十分紧迫，即与其他活性层相比，Pd/rGO层在（1-8）电压范围内，在0.6-4.8 W的功率下对氮氧化物的传感表现出更好的性能。这项前沿研究将使一类新型的便携式NO气体传感器得以构建，其尺寸为毫米级且功耗为微瓦级。
