Sakai Osamu, Kitagawa Takayuki, Sakurai Keiji, Itami Go, Miyagi Shigeyuki, Noborio Kazuyuki, Taguchi Kohshi
Department of Electronic Systems Engineering, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan.
Regional ICT Research Center for Human, Industry and Future, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan.
Sci Rep. 2021 Jan 14;11(1):1364. doi: 10.1038/s41598-020-80501-z.
In situ sensing with wireless digital-data transfer is a potential processing scheme that works very closely to the location of an event monitored by a sensor and converts the sensor's raw output into digitized and informative small-volume bits, as suggested by recent proposals for edge computing and the Internet of Things (IoT). Colour perception may be a target of in situ sensor data acquisition; however, in contrast to from other sensing devices, colour sensors that detect visible light signals are usually located away from light-emitting sources, collecting light transmitting through the space and attenuating it in some manner. For example, in a vacuum chamber whose gas pressure is much less than the ambient atmosphere in which the sensors usually work, there are many veiled light sources, such as discharge plasma, for various industrial purposes including nanoscale manufacturing. In this study, we designed an in-vacuum colour sensor that can work with analogue-to-digital conversion and transfer data by wireless communication; this sensor is active in a low-pressure plasma chamber, detecting light signals and transferring them to a personal computer located outside the vacuum chamber. In addition to detecting lights with controlled spectra from outside successfully, we achieved complete operation of our in-vacuum active sensor for plasma emissions generated at 100 Pa. Comparing the signals with data from simultaneous monitoring by a monochromator, we established that the recorded signals arose from the plasma, confirming successful direct detection of low-pressure plasma emissions without any filtering effects between the sensor and the target object.
具有无线数字数据传输功能的原位传感是一种潜在的处理方案，它与传感器监测事件的位置紧密相关，并将传感器的原始输出转换为数字化且信息丰富的小容量数据位，正如近期边缘计算和物联网（IoT）提案所建议的那样。颜色感知可能是原位传感器数据采集的一个目标；然而，与其他传感设备不同，检测可见光信号的颜色传感器通常远离发光源，收集穿过空间并以某种方式衰减的光。例如，在一个气压远低于传感器通常工作的环境大气的真空室中，有许多隐蔽的光源，如用于包括纳米制造在内的各种工业目的的放电等离子体。在本研究中，我们设计了一种可在真空中工作的颜色传感器，它能够进行模数转换并通过无线通信传输数据；该传感器在低压等离子体室中工作，检测光信号并将其传输到位于真空室外的个人计算机。除了成功检测来自外部的具有可控光谱的光之外，我们还实现了我们的真空有源传感器对100 Pa下产生的等离子体发射的完整操作。将这些信号与单色仪同时监测的数据进行比较，我们确定记录的信号来自等离子体，证实了在传感器和目标物体之间没有任何滤波效应的情况下成功直接检测到低压等离子体发射。
