Faculty of Science, Kunming University of Science and Technology, Kunming 650500, China.
Yunnan Key Laboratory of Disaster Reduction in Civil Engineering, Kunming 650500, China.
Sensors (Basel). 2023 Feb 23;23(5):2468. doi: 10.3390/s23052468.
The vacuum degree is the key parameter reflecting the quality and performance of vacuum glass. This investigation proposed a novel method, based on digital holography, to detect the vacuum degree of vacuum glass. The detection system was composed of an optical pressure sensor, a Mach-Zehnder interferometer and software. The results showed that the deformation of monocrystalline silicon film in an optical pressure sensor could respond to the attenuation of the vacuum degree of vacuum glass. Using 239 groups of experimental data, pressure differences were shown to have a good linear relationship with the optical pressure sensor's deformations; pressure differences were linearly fitted to obtain the numerical relationship between pressure difference and deformation and to calculate the vacuum degree of the vacuum glass. Measuring the vacuum degree of vacuum glass under three different conditions proved that the digital holographic detection system could measure the vacuum degree of vacuum glass quickly and accurately. The optical pressure sensor's deformation measuring range was less than 4.5 μm, the measuring range of the corresponding pressure difference was less than 2600 pa, and the measuring accuracy's order of magnitude was 10 pa. This method has potential market applications.
真空度是反映真空玻璃质量和性能的关键参数。本研究提出了一种基于数字全息术的真空玻璃真空度检测新方法。检测系统由光学压力传感器、马赫-曾德尔干涉仪和软件组成。结果表明，光学压力传感器中单晶硅膜的变形可以响应真空玻璃真空度的衰减。使用 239 组实验数据，表明压差与光学压力传感器的变形之间具有良好的线性关系；通过线性拟合压差，得到了压差与变形之间的数值关系，并计算出真空玻璃的真空度。在三种不同条件下测量真空玻璃的真空度证明，数字全息检测系统可以快速准确地测量真空玻璃的真空度。光学压力传感器的变形测量范围小于 4.5μm，对应的压差测量范围小于 2600Pa，测量精度的数量级为 10Pa。该方法具有潜在的市场应用价值。
