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采用鼓包试验测量不同基底对亚微米钛镍形状记忆合金薄膜力学性能的影响

Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test.

作者信息

Dang Nhat Minh, Wang Zhao-Ying, Wu Ti-Yuan, Nguyen Tra Anh Khoa, Lin Ming-Tzer

机构信息

Graduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 40749, Taiwan.

i - Center for Advanced Science Technology, National Chung Hsing University, Taichung 40749, Taiwan.

出版信息

Micromachines (Basel). 2021 Jan 15;12(1):85. doi: 10.3390/mi12010085.

DOI:10.3390/mi12010085
PMID:33467736
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7830441/
Abstract

This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-60at%Ni. Deposition was done using the physical vapor deposition (PVD) process, and the microstructural changes and crystallization phase changes were observed through scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results showed that the TiNi thin film with a Cr adhesion layer had better mechanical properties. The bulge test showed that TiNi thin film with a Cr adhesion had a higher Young's modulus and lower residual stress. From the thermal cycling experiment, it was found that the Cr adhesion layer buffered the mismatch between TiNi and SiNx. Additionally, the thermal cycling test was also used to measure the thermal expansion coefficient of the films, and the fatigue test showed that the Cr layer significantly improved the fatigue resistance of the TiNi film.

摘要

本研究调查了不同衬底对Ti-60at%Ni形状记忆合金（SMA）力学性能的影响。为此实验制备了两种类型的样品：（1）沉积在SiNx上的Ti-60at%Ni，以及（2）沉积在SiNx/Cr上的Ti-60at%Ni；两者均有600 nm厚的Ti-60at%Ni薄膜。采用物理气相沉积（PVD）工艺进行沉积，并通过扫描电子显微镜（SEM）和X射线衍射（XRD）观察微观结构变化和结晶相变。结果表明，具有Cr粘附层的TiNi薄膜具有更好的力学性能。凸起试验表明，具有Cr粘附层的TiNi薄膜具有更高的杨氏模量和更低的残余应力。从热循环实验发现，Cr粘附层缓冲了TiNi与SiNx之间的不匹配。此外，热循环试验还用于测量薄膜的热膨胀系数，疲劳试验表明Cr层显著提高了TiNi薄膜的抗疲劳性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/2dfe0b1e50b6/micromachines-12-00085-g021.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/9801af81d2b1/micromachines-12-00085-g004.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/5c712909f669/micromachines-12-00085-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/c04cdcbccef0/micromachines-12-00085-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/0c5d18373753/micromachines-12-00085-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/aee369b74830/micromachines-12-00085-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/61c45815bf30/micromachines-12-00085-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/1b25d8391cb9/micromachines-12-00085-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/a32f6eeb3fc2/micromachines-12-00085-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/430c24f465ef/micromachines-12-00085-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/5da8cad429dd/micromachines-12-00085-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/cf27aeaaf5e9/micromachines-12-00085-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/db975f0efe0c/micromachines-12-00085-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/a886959a2e1b/micromachines-12-00085-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/121b/7830441/2dfe0b1e50b6/micromachines-12-00085-g021.jpg

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