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一种微机电系统（MOEMS）有源聚焦装置的评估与优化

Evaluation and Optimization of a MOEMS Active Focusing Device.

作者信息

Mescheder Ulrich, Lootze Michael, Aljasem Khaled

机构信息

Department of Mechanical & Medical Engineering, Institute for Microsystems Technology (IMST), Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany.

Associated to the Faculty of Engineering, University of Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg im Breisgau, Germany.

出版信息

Micromachines (Basel). 2021 Feb 9;12(2):172. doi: 10.3390/mi12020172.

DOI:10.3390/mi12020172
PMID:33572402
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7916260/
Abstract

In this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavior. The devices are realized in silicon on insulator technology. The influence of internal stress especially resulting from the high compressive buried oxide (BOX) layer is evaluated. Additionally, the effect of stress gradients in the crystalline device layer and of high reflective coatings such as aluminum is discussed. The influence of variations of some important process steps on the device performance is quantified. Finally, practical properties such as focal length control, long-term stability, hysteresis and dynamical response are presented and evaluated. The evaluation proves that the proposed membrane focusing device is suitable for high performance imaging (wavefront errors between λ/5-λ/10) with a large aperture (5 mm).

摘要

在本文中，我们对一种用于主动聚焦的微机电光系统（MOEMS）进行了详细评估，该系统通过静电变形的薄硅膜实现。评估采用有限元方法以及对器件行为的实验表征。这些器件采用绝缘体上硅技术实现。评估了内部应力的影响，尤其是由高压缩性掩埋氧化物（BOX）层产生的应力。此外，还讨论了晶体器件层中的应力梯度以及诸如铝等高反射涂层的影响。量化了一些重要工艺步骤的变化对器件性能的影响。最后，展示并评估了焦距控制、长期稳定性、滞后和动态响应等实际特性。评估证明，所提出的膜聚焦器件适用于大孔径（5毫米）的高性能成像（波前误差在λ/5 - λ/10之间）。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/4fe50251215c/micromachines-12-00172-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/5dcc53a369ac/micromachines-12-00172-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/0d35b71f135b/micromachines-12-00172-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/f3916a355704/micromachines-12-00172-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/ba3138866b6e/micromachines-12-00172-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/fa1cbdd0a542/micromachines-12-00172-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/3e2134da773d/micromachines-12-00172-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/a3ab6475a829/micromachines-12-00172-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/956f097f7881/micromachines-12-00172-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/39a926940455/micromachines-12-00172-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/9157f8b24597/micromachines-12-00172-g014.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/3b8a8b162b20/micromachines-12-00172-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/2554f53ed3a3/micromachines-12-00172-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/4fe50251215c/micromachines-12-00172-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/5dcc53a369ac/micromachines-12-00172-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/204da9384bf0/micromachines-12-00172-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/bc1c849257f4/micromachines-12-00172-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/67c3597243ab/micromachines-12-00172-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/63ba459090ca/micromachines-12-00172-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/0d35b71f135b/micromachines-12-00172-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/f3916a355704/micromachines-12-00172-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/ba3138866b6e/micromachines-12-00172-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/fa1cbdd0a542/micromachines-12-00172-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/3e2134da773d/micromachines-12-00172-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/a3ab6475a829/micromachines-12-00172-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/956f097f7881/micromachines-12-00172-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/39a926940455/micromachines-12-00172-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/9157f8b24597/micromachines-12-00172-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/a9cba1cec236/micromachines-12-00172-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/3b8a8b162b20/micromachines-12-00172-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/2554f53ed3a3/micromachines-12-00172-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9626/7916260/4fe50251215c/micromachines-12-00172-g018.jpg

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