Pribošek Jaka, Bainschab Markus, Sasaki Takashi
Silicon Austria Labs, Villach, Austria.
Microsyst Nanoeng. 2023 Oct 27;9:135. doi: 10.1038/s41378-022-00481-0. eCollection 2023.
Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.
最近的进展使基于微机电系统（MEMS）的变焦镜性能达到了与传统超高速聚焦设备相当的水平。变焦镜正变得能够实现超过300个可分辨平面的高轴向分辨率，可实现微秒级响应时间、数百千赫兹以上的连续运行，并且可以设计成在单芯片设备中将聚焦与横向转向相结合。本综述总结了变焦MEMS镜在过去50年的科学进展，是该领域迄今为止最全面的研究。我们引入了一种用于变焦镜的新优值，在此基础上我们评估并比较了文献中几乎所有报道的器件。本综述的前沿内容是分析各种驱动技术的优缺点，以及对据报道在速度、分辨率和形状保真度方面提高聚焦性能的方法进行系统研究。我们相信这种分析将推动下一代变焦镜的未来技术发展，使其轴向分辨率达到1000个可分辨平面。
