A Hybrid Strategy for Profile Measurement of Micro Gear Teeth.

A hybrid strategy is proposed to meet the challenge of obtaining the profile of micro gear teeth with a small modulus. Firstly, the contact probe segmentally obtained the falling flank profiles with an auxiliary lifting mechanism to avoid interference when it climbs on the rising slope. Then, the noncontact chromatic confocal displacement sensor efficiently acquired the gear peak positions to carry out the two-point error separation with the gear peak positions from the probe measurement. Finally, actual experiments were carried out to obtain the profile of a harmonic drive flexspline. Compared with the commercial ultraprecise profiler, the proposed method provides measurement results with a deviation of less than 20 μm. In conclusion, the hybrid strategy is feasible and accurate for drawing the micro gear teeth profile without any collision between the measuring probes and the measured workpiece.