Huang Guangyao, Bai Jiao, Feng Feng, Zeng Long, Feng Pingfa, Li Xinghui
Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Institute of Materials, China Academy of Engineering Physics, Mianyang 621900, China.
Micromachines (Basel). 2023 Sep 2;14(9):1729. doi: 10.3390/mi14091729.
A hybrid strategy is proposed to meet the challenge of obtaining the profile of micro gear teeth with a small modulus. Firstly, the contact probe segmentally obtained the falling flank profiles with an auxiliary lifting mechanism to avoid interference when it climbs on the rising slope. Then, the noncontact chromatic confocal displacement sensor efficiently acquired the gear peak positions to carry out the two-point error separation with the gear peak positions from the probe measurement. Finally, actual experiments were carried out to obtain the profile of a harmonic drive flexspline. Compared with the commercial ultraprecise profiler, the proposed method provides measurement results with a deviation of less than 20 μm. In conclusion, the hybrid strategy is feasible and accurate for drawing the micro gear teeth profile without any collision between the measuring probes and the measured workpiece.
提出了一种混合策略，以应对获取小模数微型齿轮齿形的挑战。首先，接触式探头借助辅助提升机构分段获取下降齿侧轮廓，以避免在爬坡时产生干涉。然后，非接触式共焦位移传感器有效地获取齿轮峰值位置，以便与探头测量得到的齿轮峰值位置进行两点误差分离。最后，通过实际实验获得了谐波传动柔轮的齿形。与商用超精密轮廓仪相比，该方法提供的测量结果偏差小于20μm。总之，该混合策略对于绘制微型齿轮齿形是可行且准确的，测量探头与被测工件之间不会发生任何碰撞。
