College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China.
Fujian Key Laboratory of Green Intelligent Drive and Transmission for Mobile Machinery, Huaqiao University, Xiamen 361021, China.
Sensors (Basel). 2022 Dec 7;22(24):9596. doi: 10.3390/s22249596.
Conventional chromatic confocal systems are mostly single-point coaxial illumination systems with a low signal-to-noise ratio, light energy utility and measurement efficiency. To overcome the above shortcomings, we propose a parallel non-coaxial-illumination chromatic-confocal-measurement system based on an optical fiber bundle. Based on the existing single-point non-coaxial-illumination system, the optical fiber bundle is used as the optical beam splitter to achieve parallel measurements. Thus, the system can yield measurements through line scanning, which greatly improves measurement efficiency. To verify the measurement performance of the system, based on the calibration experiment, the system realizes the measurement of the height of the step, the thickness of the transparent specimen and the reconstruction of the three-dimensional topography of the surface of the step and coin. The experimental results show that the measuring range of the system is 200 μm. The measurement accurcy can reach micron level, and the system can realize a good three-dimensional topography reconstruction effect.
传统的彩色共焦系统大多是单点同轴照明系统，具有信噪比低、光能利用率和测量效率低的缺点。为了克服上述缺点，我们提出了一种基于光纤束的并行非同轴照明彩色共焦测量系统。在现有的单点非同轴照明系统的基础上，采用光纤束作为光束分光器，实现了并行测量。因此，系统可以通过线扫描进行测量，大大提高了测量效率。为了验证系统的测量性能，基于校准实验，系统实现了台阶高度、透明样本厚度以及台阶和硬币表面三维形貌的重建。实验结果表明，系统的测量范围为 200μm。测量精度可达微米级，系统能够实现良好的三维形貌重建效果。
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