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具有可编程晶格结构的柔性压力传感器的简易制造

Facile Fabrication of Flexible Pressure Sensor with Programmable Lattice Structure.

作者信息

Yin Yi Ming, Li Hua Yang, Xu Jin, Zhang Chen, Liang Fei, Li Xin, Jiang Yang, Cao Jin Wei, Feng Han Fang, Mao Jia Nan, Qin Ling, Kang Yi Fan, Zhu Guang

机构信息

New Materials Institute, Department of Mechanical, Materials and Manufacturing Engineering, University of Nottingham Ningbo China, Ningbo 315100, China.

CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China.

出版信息

ACS Appl Mater Interfaces. 2021 Mar 3;13(8):10388-10396. doi: 10.1021/acsami.0c21407. Epub 2021 Feb 19.

DOI:10.1021/acsami.0c21407
PMID:33601883
Abstract

Flexible pressure sensors have attracted intense attention because of their widespread applications in electronic skin, human-machine interfaces, and healthcare monitoring. Conductive porous structures are always utilized as active layers to improve the sensor sensitivities. However, flexible pressure sensors derived from traditional foaming techniques have limited structure designability. Besides, random pore distribution causes difference in structure and signal repeatability between different samples even in one batch, therefore limiting the batch production capabilities. Herein, we introduce a structure designable lattice structure pressure sensor (LPS) produced by bottom-up digital light processing (DLP) 3D printing technique, which is capable of efficiently producing 55 high fidelity lattice structure models in 30 min. The LPS shows high sensitivity (1.02 kPa) with superior linearity over a wide pressure range (0.7 Pa to 160 kPa). By adjusting the design parameters such as lattice type and layer thickness, the electrical sensitivities and mechanical properties of LPS can be accurately controlled. In addition, the LPS endures up to 60000 compression cycles (at 10 kPa) without any obvious electrical signal degradation. This benefits from the firm carbon nanotubes (CNTs) coating derived from high-energy ultrasonic probe and the subsequent thermal curing process of UV-heat dual-curing photocurable resin. For practical applications, the LPS is used for real time pulse monitoring, voice recognition and Morse code communication. Furthermore, the LPS is also integrated to make a flexible 4 × 4 sensor arrays for detecting spatial pressure distribution and a flexible insole for foot pressure monitoring.

摘要

柔性压力传感器因其在电子皮肤、人机接口和医疗监测等领域的广泛应用而备受关注。导电多孔结构常被用作活性层以提高传感器的灵敏度。然而,传统发泡技术制备的柔性压力传感器结构设计性有限。此外,随机的孔分布导致即使在同一批次中不同样品之间的结构和信号重复性存在差异,从而限制了批量生产能力。在此,我们介绍一种通过自下而上的数字光处理(DLP)3D打印技术制造的结构可设计的晶格结构压力传感器(LPS),它能够在30分钟内高效生产55个高保真晶格结构模型。该LPS在宽压力范围(0.7帕至160千帕)内具有高灵敏度(1.02千帕)和优异的线性度。通过调整晶格类型和层厚等设计参数,可以精确控制LPS的电灵敏度和机械性能。此外,LPS在10千帕下可承受多达60000次压缩循环而无明显电信号衰减。这得益于高能超声探头衍生的牢固碳纳米管(CNT)涂层以及随后紫外-热双固化光固化树脂的热固化过程。在实际应用中,LPS用于实时脉搏监测、语音识别和摩尔斯码通信。此外,LPS还被集成制成用于检测空间压力分布的柔性4×4传感器阵列以及用于足部压力监测的柔性鞋垫。

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