Xu Shuoyan, Xu Zigan, Li Ding, Cui Tianrui, Li Xin, Yang Yi, Liu Houfang, Ren Tianling
School of Integrated Circuit, Tsinghua University, Beijing 100084, China.
Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.
Polymers (Basel). 2023 Jun 16;15(12):2699. doi: 10.3390/polym15122699.
Spatial distribution perception has become an important trend for flexible pressure sensors, which endows wearable health devices, bionic robots, and human-machine interactive interfaces (HMI) with more precise tactile perception capabilities. Flexible pressure sensor arrays can monitor and extract abundant health information to assist in medical detection and diagnosis. Bionic robots and HMI with higher tactile perception abilities will maximize the freedom of human hands. Flexible arrays based on piezoresistive mechanisms have been extensively researched due to the high performance of pressure-sensing properties and simple readout principles. This review summarizes multiple considerations in the design of flexible piezoresistive arrays and recent advances in their development. First, frequently used piezoresistive materials and microstructures are introduced in which various strategies to improve sensor performance are presented. Second, pressure sensor arrays with spatial distribution perception capability are discussed emphatically. Crosstalk is a particular concern for sensor arrays, where mechanical and electrical sources of crosstalk issues and the corresponding solutions are highlighted. Third, several processing methods are also introduced, classified as printing, field-assisted and laser-assisted fabrication. Next, the representative application works of flexible piezoresistive arrays are provided, including human-interactive systems, healthcare devices, and some other scenarios. Finally, outlooks on the development of piezoresistive arrays are given.
空间分布感知已成为柔性压力传感器的一个重要发展趋势,这赋予了可穿戴健康设备、仿生机器人和人机交互界面(HMI)更精确的触觉感知能力。柔性压力传感器阵列能够监测并提取丰富的健康信息,以辅助医学检测和诊断。具有更高触觉感知能力的仿生机器人和人机交互界面将最大限度地解放人类的双手。基于压阻机制的柔性阵列由于其优异的压力传感性能和简单的读出原理而得到了广泛研究。本文综述了柔性压阻阵列设计中的多个考量因素及其发展的最新进展。首先,介绍了常用的压阻材料和微结构,并提出了各种提高传感器性能的策略。其次,着重讨论了具有空间分布感知能力的压力传感器阵列。串扰是传感器阵列需要特别关注的问题,文中突出了串扰问题的机械和电气来源以及相应的解决方案。第三,还介绍了几种加工方法,分为印刷、场辅助和激光辅助制造。接下来,给出了柔性压阻阵列的代表性应用成果,包括人机交互系统、医疗保健设备以及其他一些场景。最后,对压阻阵列的发展进行了展望。