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一种用于非线性机械耦合谐振传感器质量检测的新型频率稳定方法。

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors.

作者信息

Li Lei, Liu Hanbiao, Shao Mingyu, Ma Chicheng

机构信息

School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China.

State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.

出版信息

Micromachines (Basel). 2021 Feb 11;12(2):178. doi: 10.3390/mi12020178.

DOI:10.3390/mi12020178
PMID:33670263
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7917976/
Abstract

Frequency stabilization can overcome the dependence of resonance frequency on amplitude in nonlinear microelectromechanical systems, which is potentially useful in nonlinear mass sensor. In this paper, the physical conditions for frequency stabilization are presented theoretically, and the influence of system parameters on frequency stabilization is analyzed. Firstly, a nonlinear mechanically coupled resonant structure is designed with a nonlinear force composed of a pair of bias voltages and an alternating current (AC) harmonic load. We study coupled-mode vibration and derive the expression of resonance frequency in the nonlinear regime by utilizing perturbation and bifurcation analysis. It is found that improving the quality factor of the system is crucial to realize the frequency stabilization. Typically, stochastic dynamic equation is introduced to prove that the coupled resonant structure can overcome the influence of voltage fluctuation on resonance frequency and improve the robustness of the sensor. In addition, a novel parameter identification method is proposed by using frequency stabilization and bifurcation jumping, which effectively avoids resonance frequency shifts caused by driving voltage. Finally, numerical studies are introduced to verify the mass detection method. The results in this paper can be used to guide the design of a nonlinear sensor.

摘要

频率稳定可以克服非线性微机电系统中共振频率对振幅的依赖，这在非线性质量传感器中具有潜在的应用价值。本文从理论上给出了频率稳定的物理条件，并分析了系统参数对频率稳定的影响。首先，设计了一种非线性机械耦合谐振结构，其非线性力由一对偏置电压和一个交流（AC）谐波负载组成。我们利用微扰和分岔分析研究了耦合模式振动，并推导了非线性区域中共振频率的表达式。研究发现，提高系统的品质因数对于实现频率稳定至关重要。通常，引入随机动力学方程来证明耦合谐振结构可以克服电压波动对谐振频率的影响，并提高传感器的鲁棒性。此外，提出了一种利用频率稳定和分岔跳跃的新型参数识别方法，有效避免了驱动电压引起的谐振频率偏移。最后，通过数值研究验证了质量检测方法。本文的结果可用于指导非线性传感器的设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/6fedc463f442/micromachines-12-00178-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/6ead7d96b284/micromachines-12-00178-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/f336337117c9/micromachines-12-00178-g009.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/6fedc463f442/micromachines-12-00178-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/e4a0c5e91dc1/micromachines-12-00178-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/01f5c107a894/micromachines-12-00178-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/2c4f7a5f423d/micromachines-12-00178-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/766a672a0759/micromachines-12-00178-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/e525486591e5/micromachines-12-00178-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/b6746a625fdb/micromachines-12-00178-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/410ff257b965/micromachines-12-00178-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/6ead7d96b284/micromachines-12-00178-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/f336337117c9/micromachines-12-00178-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/93c358542df8/micromachines-12-00178-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/f36829097325/micromachines-12-00178-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/49f99d4bb85f/micromachines-12-00178-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ee0/7917976/6fedc463f442/micromachines-12-00178-g013.jpg

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