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微机械谐振式加速度计的闭环控制与输出稳定性分析

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer.

作者信息

Liu Heng, Zhang Yu, Wu Jiale

机构信息

School of Electronic & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China.

出版信息

Micromachines (Basel). 2022 Aug 8;13(8):1281. doi: 10.3390/mi13081281.

DOI:10.3390/mi13081281
PMID:36014203
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9416272/
Abstract

In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass and the area facing the detection capacitor plate and by decreasing the stiffness of the fold beams and the initial distance between the plate capacitors. Sensitivity is also related to the detection voltage: the larger the detection voltage, the greater the sensitivity. The dynamic equation of the closed-loop self-excited drive of the accelerometer is established, and the steady-state equilibrium point of the vibration amplitude and the stability condition are obtained using the average period method. Under the constraint conditions of the PI controller, when the loading acceleration changes, the vibration amplitude is related to the reference voltage and the pre-conversion coefficient of the interface circuit and has nothing to do with the quality factor. When the loading voltage is 2 V, the sensitivity is 321 Hz/g. Three Allan variance analysis methods are used to obtain the frequency deviation of 0.04 Hz and the amplitude deviation of 0.06 mVwithin 30 min at room temperature. When the temperature error in the incubator is ±0.01 °C, the frequency deviation decreases to 0.02 Hz, and the resolution is 56ug. The fully overlapping Allan variance analysis method (FOAV) requires a large amount of data and takes a long time to implement but has the most accurate stabilityof the three methods.

摘要

在本研究中，分析了基于静电刚度的微机械谐振加速度计的动力学方程，并获得了影响灵敏度的参数。可以通过增加检测质量块和检测电容极板的正对面积，以及减小折叠梁的刚度和极板间的初始距离来提高灵敏度。灵敏度还与检测电压有关：检测电压越大，灵敏度越高。建立了加速度计闭环自激驱动的动力学方程，并采用平均周期法获得了振动幅度的稳态平衡点和稳定性条件。在PI控制器的约束条件下，当负载加速度变化时，振动幅度与参考电压和接口电路的预转换系数有关，与品质因数无关。当负载电压为2V时，灵敏度为321Hz/g。采用三种阿伦方差分析方法，在室温下30分钟内得到频率偏差为0.04Hz，幅度偏差为0.06mV。当培养箱内温度误差为±0.01°C时，频率偏差降至0.02Hz，分辨率为56μg。完全重叠阿伦方差分析方法（FOAV）需要大量数据且实施时间长，但在这三种方法中具有最精确的稳定性。

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