Jia Shuhai, Peng Jun, Bian Jiaming, Zhang Shuo, Xu Shunjian, Zhang Bao
School of Mechanical and Electrical Engineering, Xinyu University, Xinyu 338004, China.
School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Micromachines (Basel). 2021 Feb 22;12(2):221. doi: 10.3390/mi12020221.
A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator's working principle and magnetic circuit were analyzed. The calculation results show that the actuator's output torque is decisive to the air gap's magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°).
本文提出了一种用于光纤开关的微机电系统（MEMS）电磁摆动式致动器。该致动器尺寸紧凑，为5.1×5.1×5.3毫米，由两个定子、一个摆动盘（转子）、一根旋转轴和保护盖组成。采用多绕组定子和多极转子来增加致动器的输出扭矩。分析了致动器的工作原理和磁路。计算结果表明，致动器的输出扭矩对定子与摆动盘之间气隙的磁通密度起决定性作用。在每个绕组中心嵌入镍铁合金磁芯以增加磁通密度。开发了一种特殊制造工艺，用于在铁氧体基板上制造定子绕组。六个铜绕组和镍铁磁芯被电镀到铁氧体基板上。在摆动盘上的钐钴永磁体上配置了相应的六个磁极。设计并制造了具有特定尺寸的磁化装置，以对摆动盘的永磁体进行磁化。制造了致动器原型并测试了其性能。结果表明，该致动器具有大输出扭矩（40μNm）、快速响应（5毫秒）和大摆动角度（22°）。
