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微机电系统（MEMS）电磁致动器的最新设计与应用进展

Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators.

作者信息

Cheng Jianqun, Xue Ning, Qiu Bocang, Qin Boqi, Zhao Qingchun, Fang Gang, Yao Zhihui, Zhou Wenyi, Sun Xuguang

机构信息

School of Electronics and Communication Engineering, Quanzhou University of Information Engineering, Quanzhou 362000, China.

出版信息

Micromachines (Basel). 2025 May 31;16(6):670. doi: 10.3390/mi16060670.

DOI:10.3390/mi16060670
PMID:40572389
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12194837/
Abstract

Micro-electro-mechanical system (MEMS) electromagnetic actuators have rapidly evolved into critical components of various microscale applications, offering significant advantages including precision, controllability, high force density, and rapid responsiveness. Recent advancements in actuator design, fabrication methodologies, smart control integration, and emerging application domains have significantly broadened their capabilities and practical applications. This comprehensive review systematically analyzes the recent developments in MEMS electromagnetic actuators, highlighting core operating principles such as Lorentz force and magnetic attraction/repulsion mechanisms and examining state-of-the-art fabrication technologies, such as advanced microfabrication techniques, additive manufacturing, and innovative material applications. Additionally, we provide an in-depth discussion on recent enhancements in actuator performance through smart and adaptive integration strategies, focusing on improved reliability, accuracy, and dynamic responsiveness. Emerging application fields, particularly micro-optical systems, microrobotics, precision micromanipulation, and microfluidic components, are extensively explored, demonstrating how recent innovations have significantly impacted these sectors. Finally, critical challenges, including miniaturization constraints, integration complexities, power efficiency, and reliability issues, are identified, alongside a prospective outlook outlining promising future research directions. This review aims to serve as an authoritative resource, fostering further innovation and technological advancement in MEMS actuators and related interdisciplinary fields.

摘要

微机电系统（MEMS）电磁致动器已迅速发展成为各种微尺度应用的关键组件，具有诸多显著优势，包括精度高、可控性强、力密度高和响应速度快等。致动器设计、制造方法、智能控制集成以及新兴应用领域的最新进展显著拓宽了其功能和实际应用范围。这篇综述系统地分析了MEMS电磁致动器的最新发展，重点介绍了诸如洛伦兹力和磁吸引/排斥机制等核心工作原理，并研究了先进的微制造技术、增材制造和创新材料应用等先进制造技术。此外，我们深入讨论了通过智能和自适应集成策略实现的致动器性能的最新提升，重点关注提高可靠性、精度和动态响应能力。广泛探讨了新兴应用领域，特别是微光学系统、微型机器人技术、精密微操作和微流体组件，展示了近期创新如何对这些领域产生重大影响。最后，确定了关键挑战，包括小型化限制、集成复杂性、功率效率和可靠性问题，同时展望了未来有前景的研究方向。这篇综述旨在成为权威性资源，推动MEMS致动器及相关跨学科领域的进一步创新和技术进步。

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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/063f/12194837/695d57f2426f/micromachines-16-00670-g011.jpg

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