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基于飞秒激光和氢氟酸蚀刻的耐高温纯石英光栅同时测量温度和折射率

Simultaneous Measurement of Temperature and Refractive Index Using High Temperature Resistant Pure Quartz Grating Based on Femtosecond Laser and HF Etching.

作者信息

Zhao Na, Lin Qijing, Yao Kun, Zhang Fuzheng, Tian Bian, Chen Feng, Jiang Zhuangde

机构信息

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Collaborative Innovation Center of High-End Manufacturing Equipment, Xi'an Jiaotong University, Xi'an 710054, China.

出版信息

Materials (Basel). 2021 Feb 22;14(4):1028. doi: 10.3390/ma14041028.

Abstract

The optical fiber temperature and refractive index sensor combined with the hollow needle structure for medical treatment can promote the standardization of traditional acupuncture techniques and improve the accuracy of body fluid analysis. A double-parameter sensor based on fiber Bragg grating (FBG) is developed in this paper. The sensor materials are selected through X-ray diffraction (XRD) analysis, and the sensor sensing principle is theoretically analyzed and simulated. Through femtosecond laser writing pure silica fiber, a high temperature resistant wavelength type FBG temperature sensor is obtained, and the FBG is corroded by hydrofluoric acid (HF) to realize a high-sensitivity intensity-type refractive index sensor. Because the light has dual characteristics of energy and wavelength, the sensor can realize simultaneous dual-parameter sensing. The light from the lead-in optical fiber is transmitted to the sensor and affected by temperature and refractive-index; then, the reflection peak is reflected back to the lead-out fiber by the FBG. The high temperature response and the refractive index response of the sensor were measured in the laboratory, and the high temperature characteristics of the sensor were verified in the accredited institute. It is demonstrated that the proposed sensor can achieve temperature sensing up to 1150 °C with the sensitivity of 0.0134 nm/°C, and refractive sensing over a refractive range of 1.333 to 1.4027 with the sensitivity of -49.044 dBm/RIU. The sensor features the advantages of two-parameter measurement, compact structure, and wide temperature range, and it exhibits great potential in acupuncture treatment.

摘要

结合空心针结构用于医疗的光纤温度和折射率传感器可促进传统针灸技术的标准化,并提高体液分析的准确性。本文研制了一种基于光纤布拉格光栅(FBG)的双参数传感器。通过X射线衍射(XRD)分析选择传感器材料,并对传感器的传感原理进行了理论分析和模拟。通过飞秒激光写入纯石英光纤,获得了耐高温波长型FBG温度传感器,并通过氢氟酸(HF)腐蚀FBG实现了高灵敏度强度型折射率传感器。由于光具有能量和波长的双重特性,该传感器可实现双参数同时传感。从引入光纤传入的光传输到传感器并受到温度和折射率的影响;然后,反射峰由FBG反射回引出光纤。在实验室中测量了传感器的高温响应和折射率响应,并在认可机构中验证了传感器的高温特性。结果表明,所提出的传感器能够实现高达1150℃的温度传感,灵敏度为0.0134nm/℃,在1.333至1.4027的折射率范围内实现折射率传感,灵敏度为-49.044dBm/RIU。该传感器具有双参数测量、结构紧凑、温度范围宽等优点,在针灸治疗中具有很大的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/530f/7926831/f9e147de3067/materials-14-01028-g001.jpg

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